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Manufacturing method for LiCoO2 sintered body, and sputtering target made from same

A manufacturing method and a technology for sputtering targets, which are applied in the field of sputtering targets and can solve the problems of inability to stably manufacture high-density sintered bodies, inability to easily reach, and easy to crack.

Active Publication Date: 2012-11-07
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the fourth major requirement, namely, high density, is currently not easily achieved due to the strong influence of the inherent physical properties (physical properties, chemical properties) of the material.
In particular, the presence of LiCoO 2 The crystal has a layered structure, and the layers are easy to peel off, so it is easy to break during and after the production of the sintered body, and it is impossible to stably produce a high-density sintered body

Method used

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  • Manufacturing method for LiCoO2 sintered body, and sputtering target made from same
  • Manufacturing method for LiCoO2 sintered body, and sputtering target made from same
  • Manufacturing method for LiCoO2 sintered body, and sputtering target made from same

Examples

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Effect test

Embodiment 1

[0061] The average particle size (ie D 50 , hereinafter the same) a specified amount of LiCoO of 5 to 6 μm 2 Raw material powder ("CellSeed (registered trademark) C-5" manufactured by Nippon Chemical Industry Co., Ltd.) was uniformly filled in the mold, and placed in the chamber of the vacuum heat press together with the mold. Then, the inside of the chamber was decompressed to 0.013Pa (1×10 -4 support). After reaching the desired degree of vacuum, the Figure 5 The temperature-load curve shown begins to heat the raw powder. That is, after heating from room temperature to 450° C. at a rate of temperature increase of 6° C. / min, the temperature was maintained for 10 minutes. Then heat up to the set sintering temperature (80) (0)°C) at a heating rate of 3°C / min. At this time, at the moment when the temperature reaches 500°C, at 150kg / cm 2 The pressure of the raw material powder was pressed for 10 minutes. Keep the raw material powder at 800°C for 1 hour, and within half an...

Embodiment 2

[0066] A sintered body was produced under the same conditions as in Example 1 above except that the set sintering temperature was set to 820°C. After measuring the relative density and average particle diameter of the obtained sintered body, the relative density was 95.9%, and the average particle diameter was about 15 μm.

Embodiment 3

[0068] A sintered body was produced under the same conditions as in Example 1 above except that the set sintering temperature was set to 840°C. The relative density and average particle size of the obtained sintered body were measured, and the relative density was 97%, and the average particle size was about 20 μm.

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Abstract

Disclosed are a manufacturing method for a LiCoO2 sintered body, said manufacturing method enabling the safe manufacturing of a high density sintered body, and a sputtering target. The LiCoO2 sintered body manufacturing method includes a step in which LiCoO2 powder is filled into a mold. The pressure inside the mold is reduced, and the LiCoO2 powder is pressure sintered inside the mold at a temperature between 800 DEG C and 880 DEG C inclusive. The above method enables the safe production of a LiCoO2 sintered body having a relative density of at least 95% and an average particle diameter of 10[mu]m-30[mu]m inclusive.

Description

technical field [0001] The present invention relates to a kind of LiCoO that is used, for example, in the manufacture of positive electrodes for thin-film lithium secondary batteries 2 A method for manufacturing a sintered body and a sputtering target. Background technique [0002] In recent years, a thin-film lithium secondary battery has been continuously developed. A thin-film lithium secondary battery has a structure in which a positive electrode and a negative electrode sandwich a solid electrolyte. For example, the solid electrolyte uses LiPON (lithium nitrogen-containing phosphate) film, and the positive electrode uses LiCoO 2 (lithium cobaltate) film, and a metal Li film is used for the negative electrode. [0003] as LiCoO 2 The film formation method is well known as a sputtering method containing LiCoO 2 target, and form LiCoO on the substrate 2 membrane method. The following Patent Document 1 describes a method for sputtering LiCoO with a resistivity of 3 t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/00C23C14/34H01M4/525
CPCC04B2237/124H01M4/0426C04B2237/40H01M4/525C04B37/006C23C14/08C23C14/3414C04B2235/77Y02E60/122C04B2235/6562C04B2235/786C04B35/6455C04B2235/6581C04B35/645C04B2235/656C04B2235/3203H01M10/052C04B2237/34C04B2235/5436C04B2235/3275C04B35/01Y02E60/10C04B35/00C23C14/34
Inventor 金豊邹弘纲桥口正一三岛隆则荻沢隆俊井手上涉
Owner ULVAC INC