Device for detecting sub-aperture splicing surface shape with movement coordinate feedback

A technology of seed aperture splicing and surface shape detection, which is applied in the field of optical detection, can solve problems affecting splicing accuracy and achieve the effect of improving splicing accuracy

Inactive Publication Date: 2012-11-21
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

Positioning errors in the x and y directions and tilt errors in the x and y directions caused by t

Method used

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  • Device for detecting sub-aperture splicing surface shape with movement coordinate feedback
  • Device for detecting sub-aperture splicing surface shape with movement coordinate feedback
  • Device for detecting sub-aperture splicing surface shape with movement coordinate feedback

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Embodiment Construction

[0026] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0027] Such as figure 1 Show the schematic diagram of the structure of the device of the present invention, by computer 1, laser interferometer measuring head 2, mirror to be measured 3, two-dimensional translation stage 4, first reflector 5, second reflector 6, laser source 7, collimating optical system 8. First beamsplitter 9, second beamsplitter 10, third beamsplitter 11, first receiver 12, first interferometric system 13, second receiver 14, second interferometric system 15, wavelength compensator 16 , the fourth beam splitter 17, the fifth beam splitter 18, the third receiver 19, the third interferometric system 20, the fourth receiver 21, the fourth interferometric system 22, the sixth beam splitter 23, the seventh ...

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Abstract

The invention discloses a device for detecting a sub-aperture splicing surface shape with movement coordinate feedback. The device is characterized in that a mirror to be measured is disposed on a two-dimensional translation stage; the two-dimensional translation stage is controlled by a computer to move two-dimensionally on a plane of the mirror to be measured; reflecting mirrors are placed on two side surfaces of the mirror to be measured; meanwhile, a length measurement interferometer system is placed opposite to the reflecting mirrors; location error in an x direction and a y direction as well as inclination in the x direction and the y direction of the mirror to be measured are measured after two-dimensional movement through five paths of lasers, measurement data is fed back to a computer by the length measurement interferometer system, and the location error in the x direction and the y direction as well as the inclination in the x direction and the y direction into an algorithm through a sub-aperture position compensating algorithm so as to carry out splicing calculation. On a basis of the original sub-aperture splicing algorithm, with the adoption of the device disclosed by the invention, measurement precision is increased by measuring location and inclination errors during a sub-aperture splicing progress and by bringing the errors into algorithm.

Description

technical field [0001] The invention belongs to the technical field of optical detection and relates to a sub-aperture splicing surface shape detection device with motion coordinate feedback. Background technique [0002] With the continuous development of science and technology, large-aperture optical systems have been more and more widely used in high-tech fields such as astronomical optics, space optics, space target detection and recognition, and inertial confinement fusion (ICF). Manufacturing requires testing methods and instruments commensurate with its accuracy. [0003] At present, the surface processing quality of large-aperture optical components generally uses a large-aperture phase-shifting interferometer, which requires a standard surface shape that is the same as or larger than the size of the measured component, and such a high-precision standard surface, not only The processing is extremely difficult, and the manufacturing cycle is long and the manufacturin...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 贾辛徐富超谢伟民邢廷文
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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