Common reference electrode temperature controlled CO2-SOx integrated gas sensor and preparation method thereof

Abstract

The invention discloses a common reference electrode temperature controlled CO2-SOx integrated gas sensor and a preparation method thereof. The sensor comprises an alumina substrate, a heating element, a temperature measurement element, an insulating layer, a thin layer of solid electrolyte, an Au tooth-shaped film electrode, a CO2 reaction electrode, a SOx reaction electrode and a common reference electrode from the bottom up. The preparation method comprises the following steps: preparing a Pt or RuO2 heating and temperature measurement element on an Al2O3 substrate by a printing and sintering process; carrying out deposition process on a thick film micro-heating element to obtain the thin layer of solid electrolyte, an Au tooth-shaped electrode, the CO2 reaction electrode, the SOx reaction electrode and the common reference electrode, and forming a CO2-SOx gas-sensitive element combined with thin and thick-film technique by electrochemical reaction mode. According to the invention, a closed loop temperature-control system is formed by the feedback of the temperature measurement element, thus the temperature of the sensor reaches the temperature required by the work of each reaction electrode and keeps constant, and the optimum work performance of the CO2-SOx gas sensor is guaranteed.

Description

technical field [0001] The invention relates to a solid electrolyte CO 2 , SOx gas sensor and preparation method thereof, it is characterized in that CO 2 , SOx gas sensor for integration (wherein SOx is SO 2 or SO 3 ), and the integrated gradient temperature control device makes each electrode work at the optimum temperature. Background technique [0002] Solid electrolyte has good ionic conductivity in a specific temperature environment, so it is widely used in the field of gas sensors. Since Faraday first discovered PbF in 1834 2 Since the law of electrical conductivity changing with temperature, many research groups at home and abroad have begun to devote themselves to research in this area, and solid electrolyte gas sensors have become one of the important development directions. Among many solid electrolytes, Li 3 PO 4 Because of its high ion conductivity and humidity resistance at medium and high temperatures, it has attracted the attention of researchers at hom...

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Problems solved by technology

[0003] The technical problem to be solved by the present invention is to overcome the existing CO 2 or SOx (SO 2 / SO 3 ) The gas sensor has defects such as high power consumption and slow response, and provides a CO 2 -SOx integrated gas sensor and the preparation method based on the combination of thick film and thin film MEMS (micro-electromechanical system) technology, so that the sensor has a temperature control device integrating thick film heating and temperature measurement. On the temperature control device, it is prepared by microfabrication Thin film solid electrolyte CO 2 -SOx gas sensor, through the gradient temperature control device integrated in the sensor, the solid electrolyte film and CO 2 -SOx reaction electrodes work in their respective optimum temperature

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