A method for preparing silicon-based three-dimensional nanostructures by step-by-step heating
A three-dimensional nano, step-by-step heating technology, applied in the direction of nanotechnology, structural parts, electrical components, etc., can solve the problems of easy deformation of silicon materials, capacitance drop, etc.
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Embodiment 1
[0016] Place the cleaned silicon wafer in the magnetron sputtering chamber, and sputter catalyst iron particles on the silicon wafer. The parameters used are: sputtering power 150w, buffer gas of argon, flow rate of 20sccm, pressure in the chamber during sputtering The sputtering time is 0.1-1 Pascal, and the sputtering time is 20 seconds. Under the field emission scanning electron microscope, the obtained silicon wafer shows that iron particles are randomly arranged, and the particle size is 5-50 nanometers. Place the sputtered silicon wafer in a larger graphite crucible, weigh 5g of silicon monoxide powder and place it in a smaller graphite crucible, and nest the two crucibles within the range of action of the induction coil. Vacuumize the system, fill it with argon, repeat several times to ensure that there is basically no residual oxygen in the system, adjust the argon flow to 50 sccm, and adjust the valve of the gas extraction port, so that the argon can pass from the smal...
Embodiment 2
[0018] The silicon source is changed to a high-purity silicon wafer, and the rest are the same as in Embodiment 1. After the reaction is completed, the desired silicon-based three-dimensional nanostructure can also be obtained.
Embodiment 3
[0020] A method for preparing a silicon-based three-dimensional nanostructure by heating in steps, comprising the following steps:
[0021] (1) Put the cleaned silicon wafer in the sputtering chamber, use magnetron sputtering to plate a certain amount of iron on the silicon wafer as a catalyst, and the obtained silicon wafer can be seen under the field emission scanning electron microscope to randomly arrange iron particles, The particle size is 5-50 nanometers;
[0022] (2) Place an appropriate amount of silicon source in a smaller graphite crucible, and place the iron-plated silicon chip in a larger graphite crucible; the two crucibles are nested with each other so that the steam evaporated at the silicon source can pass through the silicon smoothly. sheet surface;
[0023] (3) Place the two crucibles within the range of action of the induction coil and evacuate them;
[0024] (4) Turn on the heating power supply and adjust the output power so that the temperature in the f...
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