Ethernet deterministic data transmission method of data-oriented role

Abstract

The invention provides an Ethernet deterministic data transmission method of a data-oriented role, and meets the requirements of advance process control (APC) application for collecting internal data of IC (Integrated Circuit) equipment. The method comprises the following steps: adding a communication scheduling layer between an Ethernet data link layer and a network layer; adding a real-time channel; acquiring the maximum common divisor of period values according to data of each data tracking request in a data acquiring plan to determine a macro cycle value; and dividing the macro cycle into four time ranges in a time axis according to a four-part form dividing principle, and determining transmitting modes of messages based on the characteristics of the various messages ; carrying out the bus arbitration in a way that the time triggering and event triggering are combined; and keeping time consistency of all sub-equipment in the system and the main equipment based on a clock synchronization algorithm. With the adoption of the method provided by the invention, relevant communication scheduling methods are provided to the data which have the different requirements on transmitting time limitation according to the specific characteristics of various data in the IC equipment, and the requirements of the APC application to the data access of the equipment can be met well.

Description

technical field

[0001] The invention relates to the technical fields of automatic control, computer network and real-time communication, in particular to a data role-oriented Ethernet deterministic data transmission method. Background technique

[0002] The world's leading chip manufacturers have discovered that access to various data inside semiconductor production equipment (IC equipment for short) can significantly improve product quality and reduce product cost. From the perspective of technology implementation, chip manufacturers use advanced process control (APC) technology to calculate and analyze internal data from IC equipment, thereby achieving expected control goals such as improving equipment resource utilization and reducing equipment failure rates.

[0003] A typical chip manufacturing factory usually includes dozens to hundreds of IC equipment, and each IC equipment is composed of a large number of various types of components, so the equipment contains various...

Examples

Embodiment Construction

[0048] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0049] Such as figure 1 As shown, from the perspective of chip manufacturers, the manufacturing of semiconductor integrated circuits can be divided into two levels: the enterprise level and the equipment level. Among them, the equipment layer is mainly composed of various IC equipment. From the perspective of each equipment, it can be further divided into the control layer and the equipment layer.

[0050] (1) Enterprise layer

[0051] The enterprise-level application system of a semiconductor factory is generally a manufacturing execution system (MES), which is mainly used to formulate production planning, production management and production control. Advanced Process Control (APC) is also located on this layer.

[0052] (2) Control layer

[0053] The main body of the control layer is IC equipment, which may contain dozens to hundreds of IC equipment in a factor...

technical field

[0001] The invention relates to the technical fields of automatic control, computer network and real-time communication, in particular to a data role-oriented Ethernet deterministic data transmission method. Background technique

[0002] The world's leading chip manufacturers have discovered that access to various data inside semiconductor production equipment (IC equipment for short) can significantly improve product quality and reduce product cost. From the perspective of technology implementation, chip manufacturers use advanced process control (APC) technology to calculate and analyze internal data from IC equipment, thereby achieving expected control goals such as improving equipment resource utilization and reducing equipment failure rates.

[0003] A typical chip manufacturing factory usually includes dozens to hundreds of IC equipment, and each IC equipment is composed of a large number of various types of components, so the equipment contains various...

Examples

Embodiment Construction

[0048] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0049] Such as figure 1 As shown, from the perspective of chip manufacturers, the manufacturing of semiconductor integrated circuits can be divided into two levels: the enterprise level and the equipment level. Among them, the equipment layer is mainly composed of various IC equipment. From the perspective of each equipment, it can be further divided into the control layer and the equipment layer.

[0050] (1) Enterprise layer

[0051] The enterprise-level application system of a semiconductor factory is generally a manufacturing execution system (MES), which is mainly used to formulate production planning, production management and production control. Advanced Process Control (APC) is also located on this layer.

[0052] (2) Control layer

[0053] The main body of the control layer is IC equipment, which may contain dozens to hundreds of IC equipment in a factor...

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