The invention relates to a device and method for drying by integrating vacuum, microwave and ice temperature technologies. The device is composed of a vacuum system, a refrigeration system, a microwave heating system and a detection control system. A vacuum drying chamber is arranged in a heating cavity of the microwave heating system, the side wall of the vacuum drying chamber is communicated with a pipeline, the pipeline extends out of the side wall of the heating cavity and then is connected with a cold trap, the cold trap is sequentially connected with a manual valve, an electromagnetic vacuum differential pressure value, a resistance gauge, a vacuum meter and a vacuum pump by virtue of the pipeline; the cold trap is connected with the refrigeration system; and a programmable logic control (PLC) module is respectively connected with a liquid crystal display screen, an optical fiber thermodetector, the microwave heating system, a pressure intensity automatic controller, a relay and a temperature sensor. The drying method comprises the following steps of: firstly vacuumizing the vacuum drying chamber, then rapidly and evenly cooling materials to an 'ice temperature zone', and regulating vacuum pressure, material temperature and microwave power timely by virtue of the detection control system, thus the materials are dried in an activated state. By adopting the device and method provided by the invention, the product quality can be improved, the drying time can be shortened, and the energy consumption can be reduced.