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Vacuum coater and metal high-temperature vacuum coating method

A vacuum coating and high-temperature vacuum technology, which is applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve the problems of poor coating effect, low vacuum degree, and long vacuuming time, and achieve adhesion Good, dense film, speed up the effect of vacuuming

Active Publication Date: 2013-01-02
BYD CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is that the vacuum coating device of the prior art has low vacuum degree, long vacuuming time, and poor coating effect; thereby providing a vacuum coating device with high vacuum degree, short vacuuming time, and good coating effect. Coating device

Method used

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  • Vacuum coater and metal high-temperature vacuum coating method

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Embodiment

[0045] The vacuum coating device of the present embodiment comprises a cylindrical vacuum working chamber, a low-temperature condensation copper tube is provided at the center of the vacuum working chamber, that is, the axis of the cylinder, a rotary table is arranged above the bottom surface of the vacuum working chamber, and a rotating table is arranged on the rotating table A number of first sputtering targets are erected on the edge, an inner ring heater is provided inside the first sputtering target, and a second sputtering target corresponding to the first sputtering target is provided on the side wall of the vacuum chamber, that is, the cylindrical surface of the cylinder. A sputtering target; an outer ring heater is provided on the back of the second sputtering target; a workpiece suspension is provided between the first sputtering target and the second sputtering target.

[0046] Taking the chromium nitride film layer as an example, the following steps are carried out ...

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Abstract

The invention discloses a vacuum coater and a metal high-temperature vacuum coating method, falling into vacuum coating field. The vacuum coater is provided with a gas trapper at center, and two groups of heaters (outer-ring and inner-ring). The vacuum coating method includes (1) vacuuming, turning on the gas trapper and setting heating temperature of the outer-ring heater at 30-60 DEG C.; (2) turning on the inner-ring heater while vacuum degree reaches 7-9*10<-3> Pa, and setting heating temperature of the inner-ring and outer-ring heater at 90-120 DEG C.; (3) setting temperature of the inner-ring and out-ring heaters at 60-90 DEG C. while vacuum degree reaches 3-5*10<-3> Pa, and beginning to deposit a film layer; and (4) turning off the outer-ring heater, setting temperature of the inner-ring heater at 20-50 DEG C., and heating for 5-15 min. The invention can greatly improve vacuuming rate, and shorten vacuuming time; and the film layer fabricated has good adhesion and is dense.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, in particular to a vacuum coating device and a high-temperature vacuum coating method for metals. Background technique [0002] Vacuum coating technology, that is, depositing various metal and non-metal films on the surface of the workpiece by distillation or sputtering under high vacuum conditions. Among them, the degree of vacuum plays a crucial role in the performance of the film. Especially the metal film layer. [0003] After the existing vacuum coating device is used for a period of time, according to the existing vacuum coating method, its evacuation performance is greatly reduced. Studies have shown that if the same working vacuum degree (3-5×10 -3 Pa), the time-consuming can be increased to 2.5 times of the original, resulting in a serious drop in production efficiency. Moreover, the produced film layer has poor adhesion, and the film layer is not dense enough and other defect...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/14
Inventor 黄真郭丽芬陈云陈梁
Owner BYD CO LTD
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