Light path balanced type high-speed and high-resolution laser heterodyne interference measurement method and light path balanced type high-speed and high-resolution laser heterodyne interference measurement device
A laser heterodyne interference, high-resolution technology, applied in the field of laser applications, can solve problems such as measurement speed limitations, and achieve the effect of simplifying design, high resolution, and reducing adjustment difficulty
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[0034] The examples of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0035] An optical path balanced high-speed and high-resolution laser heterodyne interferometry device, the device includes a frequency-stabilized laser 1, a beam splitter 2, a polarization beam splitter B7, a measuring prism 8, a quarter-wave plate B9, a plane mirror B10, a photoelectric detector Device A11, photodetector B12, it is characterized in that the device also includes polarization beam splitter A3, quarter wave plate A4, plane mirror A5, reference prism 6, phase meter A13, phase meter B14, switch circuit 15, measuring circuit 16 Wherein, beam splitter 2 is positioned at the output end of frequency-stabilized laser 1; Polarization beam splitter A3, quarter-wave plate A4 and plane mirror A5 are placed on the reflection direction of beam splitter 2 successively, and reference prism 6 is positioned at polarization beam splitter A3 In the reflec...
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