Multi-chip reversely-arranged etched-encapsulated base island-exposed encapsulating structure and manufacturing method thereof
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- JCET GROUP CO LTD
- Publication Date
- 2013-01-09
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
[0001] technical field
[0002] The invention relates to a multi-chip flip chip packaging structure exposed by etching first and then packaging base islands and a manufacturing method thereof, belonging to the technical field of semiconductor packaging. Background technique
[0003] The manufacturing process flow of the traditional high-density substrate package structure is as follows:
[0004] Step 1, see Figure 28 , take a substrate made of glass fiber material,
[0005] Step two, see Figure 29 , opening holes at desired locations on the fiberglass substrate,
[0006] Step three, see Figure 30 , coated with a layer of copper foil on the back of the glass fiber substrate,
[0007] Step 4, see Figure 31 , fill the conductive material in the position where the glass fiber substrate is punched,
[0008] Step five, see Figure 32 , coated with a layer of copper foil on the front of the glass fiber substrate,
[0009] Step six, see Figure 33 , coated with a photor...