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Method for manufacturing soft superconducting thin film

A superconducting thin film, flexible technology, applied in the manufacture/processing of superconductor devices, ion implantation plating, coating, etc., can solve the limited application occasions, limited mixed use of different superconducting materials work occasions, portable silicon technology Compatibility limitations and other issues, to achieve the effect of simple method, expanding application occasions and scope

Active Publication Date: 2013-01-09
NANJING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Different superconducting materials often need to be prepared on different substrates, which limits the workplace where different superconducting materials are mixed
Because it is fixed on a specific substrate, there are certain restrictions on its portability and compatibility with silicon processes
These defects further limit the application of related devices based on superconducting thin films

Method used

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  • Method for manufacturing soft superconducting thin film
  • Method for manufacturing soft superconducting thin film
  • Method for manufacturing soft superconducting thin film

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Embodiment Construction

[0020] Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, should be understood that these embodiments are only for illustrating the present invention and are not intended to limit the scope of the present invention, after having read the present invention, those skilled in the art will understand various aspects of the present invention Modifications in equivalent forms all fall within the scope defined by the appended claims of this application.

[0021] Polyimide is a ring-chain polymer with an imide ring structure in the molecular main chain, and is widely used in aerospace, electronic appliances, electromechanical, automotive and other industries. Polyimide is one of the organic polymer materials with the best comprehensive performance. It has good insulation performance and flexibility. It can withstand high temperatures above 400°C and extremely low temperatures. It will not be brittle in liquid helium at -269...

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Abstract

The invention discloses a method for manufacturing a soft superconducting thin film. The method includes following steps: cleaning a substrate and removing organic pollutants on the surface of the substrate; coating a polyimide film on the substrate and curing the polyimide film; direct-current sputtering a nitriding niobium superconducting thin film on the substrate coated with the polyimide film; removing the substrate; and stripping the substrate and the polyimide film. By the aid of the method, the soft superconducting thin film with a controllable thickness (micron dimension) can be manufactured, and application occasions and scope of the superconducting thin film and devices are widened.

Description

technical field [0001] The invention relates to a method for preparing a flexible superconducting thin film. Background technique [0002] Due to its superior electromagnetic properties, superconducting thin films are widely used in the preparation of various superconducting devices and circuits, such as superconducting Josephson junctions, superconducting quantum interference devices, superconducting thermal electron bolometers, superconducting single photon Detectors, superconducting filters, superconducting quantum circuits, superconducting electromagnetic stealth devices, etc. General superconducting thin films are prepared on rigid substrates, so they cannot be bent, and the allowable deformation is very small. Different superconducting materials often need to be prepared on different substrates, which limits the workplace where different superconducting materials are mixed. Because it is fixed on a specific substrate, there are certain restrictions on its portability...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L39/24C23C14/35C23C14/06H10N60/01
Inventor 贾小氢梁兰菊金飚兵康琳吴培亨
Owner NANJING UNIV
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