An automated material handling system

Abstract

The invention discloses an automatic material handling system which comprises an automatic material handling system body and at least one programmed processing area. The automatic material handling system body comprises an automatic conveying track circuit among the processing area and at least one stocker and sequentially consists of framework space, clean space and circulating space from top to bottom, a ceiling is arranged between the framework space and the clean space, and partition boards are arranged on the periphery of the automatic material handling system body, so that independent clean micro-environment structures can be formed in the clean space and at least a part of the framework space where the partition boards are positioned. The independent clean micro-environment structures are formed, so that even if corrosive gas flows out of processing equipment and flows into external large clean space, the corrosive gas cannot flow into clean micro-environments formed by the automatic material handling system, and influence of the gas to the quality of products is avoided.

Description

technical field [0001] The invention relates to an automatic material handling system, which can be used in the field of flat panel display manufacturing. Background technique [0002] Automatic Material Handling System (AMHS, Automatic Material Handling System), also known as crane system. This kind of handling system has a wide range of applications, such as cargo transportation at airports, material transportation in automated factories, etc.; when AMHS is applied to the field of flat-panel display manufacturing, since the manufacturing of flat-panel displays depends on multiple process steps of different processing equipment, this An Automated Material Handling System (AMHS) needs to be utilized to transfer product between handling facilities. [0003] Existing Automated Material Handling System (AMHS) see attached figure 1 As shown, it mainly includes an automatic material handling system and a plurality of program processing areas 1 (Process Bays); among them, variou...

AI Technical Summary

Problems solved by technology

However, the clean air used in the existing automated material handling system and the clean air used in multiple program processing areas are directly connected and mixed with the clean air in the large clean space of the factory building. In practical applications, it is found that due to There are a lot of processing equipment in the program processing area. These equipment will produce various waste gases or corrosive gases (such as chlorine gas, hydrogen chloride, etc.) during the production process. Once these corrosive gases overflow, these gases will go to the outside of the large clean In the space, it is in direct contact with the products in the automated material handling system, especially the products stored in the storage warehouse (Stocker), which greatly affects the quality of the products; and once this happens, it will be very difficult remove

[0007] On the other hand, in order to maintain the cleanliness and constant temperature in the clean space, it is necessary to form a certain amount of air circulation, which puts forward requirements for the circulation space (SUBFAB) and the dry coil installed in it, because the storage warehouse (Stocker) The circulation air volume must be handled together with the circulation air volume of the large clean space, the circulation air volume is relatively large, so the height of the existing circulation space is relatively high, and the construction cost is relatively high

[0008] On the other hand, considering the need for micro-vibration of a small number of processing equipment, it is often necessary to build a waffle slab for these equipment, which increases the time and cost of building the factory.

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