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Array device of atmospheric pressure flat dielectric barrier plasma jet discharge

A flat-plate medium, plasma technology, applied in the direction of plasma, electrical components, etc., can solve problems such as being unsuitable for large-scale industrial applications, large-scale impact of jet devices, and unsuitable for large-scale industrial applications.

Inactive Publication Date: 2013-01-16
XI AN JIAOTONG UNIV
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  • Application Information

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Problems solved by technology

[0004] Although the atmospheric pressure plasma jet has many advantages, the plasma produced by it is only a small strand, which cannot produce a large-area uniform discharge similar to the flat dielectric barrier discharge, so it is not suitable for large-scale industrial applications.
However, if multiple atmospheric pressure plasma jet devices are arranged side by side, the influence between each jet device will be greater, and the overall cost is proportional to the number of parallel jet devices, the structure is complex and difficult to adjust
Therefore, the current atmospheric pressure plasma jet is not suitable for large-scale industrial applications

Method used

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  • Array device of atmospheric pressure flat dielectric barrier plasma jet discharge
  • Array device of atmospheric pressure flat dielectric barrier plasma jet discharge

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Embodiment Construction

[0021] see figure 1 As shown, the present invention provides an array device for atmospheric pressure plate dielectric barrier plasma jet discharge, which is three-layer planar and mainly consists of three layers of high voltage electrode 7, flat plate barrier medium 6, and air flow channel unit. The high-voltage electrode 7 is located at the top, and is fixed in the hollow box at the top by an insulating fixing plate 8. The high-voltage electrode 7 is connected with an external high-voltage power supply. The high-voltage electrode 7 can be copper, stainless steel or aluminum alloy, and the external power supply can be For power frequency, intermediate frequency or repetitive pulse high-voltage power supply, the size and structure of the high-voltage electrode 7 are optional; the lower part of the high-voltage electrode 7 is close to the flat barrier medium 6, and the flat barrier medium 6 can be polytetrafluoroethylene, epoxy resin or Quartz glass, the left and right ends of ...

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Abstract

The invention discloses an array device of atmospheric pressure flat dielectric barrier plasma jet discharge. The device is plane-shaped in three layers and mainly comprises a high voltage electrode, a flat barrier dielectric and airflow channel units, wherein the high voltage electrode is positioned in a hollowed box body over the flat barrier dielectric and is tightly attached to the flat barrier dielectric; the airflow channel units are tightly attached below the flat barrier dielectric and mainly comprise air inlets, sealed insulation boards on the two sides and a base plate which is provided with opening holes; the air inlets are connected with high-purity inert gas sources such as He, Ar and Ne; and working gases flow into each airflow channel unit through the air inlets and outflow through each opening hole in the base plate, and a flat dielectric barrier discharge plasma is carried out simultaneously so as to form a plasma jet array.

Description

technical field [0001] The invention belongs to the technical field of gas discharge, and relates to an array generating device for discharge plasma. Background technique [0002] The non-thermal equilibrium plasma will not damage the sample to be treated because the temperature of the heavy particles and the gas is close to room temperature, and the electrons can be accelerated in the electric field to obtain high enough energy, and can collide with gas molecules at room temperature to generate excitation and dissociation , dissociation, combination or recombination reactions, generating a large number of extremely active reactive species such as electrons, ions, excited atoms, molecules and free radicals, so non-thermal equilibrium plasmas show unique technologies in various application fields Advantages and good application prospects. [0003] Atmospheric pressure plasma jet is a new type of non-thermal equilibrium plasma source. Compared with other traditional low-tempe...

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Application Information

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IPC IPC(8): H05H1/26
Inventor 邵先军常正实穆海宝张冠军
Owner XI AN JIAOTONG UNIV