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A length measurement and traceability method based on the graphene bond length as a measurement basis

A technology of measurement benchmark and length measurement

Inactive Publication Date: 2015-10-28
XI AN JIAOTONG UNIV
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Problems solved by technology

Now more and more modern measurement and processing require the measured data to have real-time precision traceability, but the accuracy and real-time stability of the measured precision data are often not known in actual detection and processing, so the target to be tested is sub-nanometer The measurement and traceability of high-level precision are particularly important

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  • A length measurement and traceability method based on the graphene bond length as a measurement basis
  • A length measurement and traceability method based on the graphene bond length as a measurement basis
  • A length measurement and traceability method based on the graphene bond length as a measurement basis

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Embodiment Construction

[0020] The present invention will be described in further detail below in conjunction with the accompanying drawings and working principle.

[0021] combine figure 2 As shown, the test system consists of an ultra-precise synchronous motion linkage device system 5, a graphene reference sample detection device 1 and a graphene standard sample mobile workbench 3, a test object detection device 2 and a test object mobile workbench 4, signal analysis The control system consists of 8 components. In the scanning measurement, the graphene and the object to be measured are placed on their respective workbenches, and placed under the graphene reference sample detection device 1 and the object to be measured detection device 2 respectively.

[0022] The graphene standard sample mobile workbench 3 and the object-to-be-measured mobile workbench 4 are linked through an ultra-precise synchronous motion linkage device system 5, and there is a sub-nanometer quantitative displacement function...

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Abstract

The invention discloses a length measuring and tracing method using a graphene bond length as a measuring reference. The graphene bond length is used as a length measuring and tracing reference, length measuring and tracing are carried out on an object to be detected by the number of detected graphene bond lengths, and sub-nanometer grade precision length measuring and tracing are realized. Ultra-precision synchronous motion control connection is carried out on the object to be detected and a graphene reference sample bearing table, the number of the graphene bond lengths is scanned to represent the motion length of the graphene reference sample bearing table, and the motion of the graphene reference sample bearing table is detected in real time, so that the sub-nanometer grade precision length measuring is carried out on the object to be detected, and sub-nanometer grade precision length measuring and tracing are realized. As graphene lattices are used as the length measuring and tracing reference, the length measuring and tracing method has the characteristics of high stability, high measuring precision capable of reaching a sub-nanometer grade, simpleness, reliability and the like and has wide application prospects in the field of ultra-precision measuring and tracing.

Description

technical field [0001] The invention belongs to the technical field of nanometric traceability, and relates to a method capable of outputting traceable measurement data with real-time precision and realizing subnanometer precision measurement and traceability. Background technique [0002] Nanotechnology has become a major field that promotes global technological innovation and economic growth. With its vigorous development, various sub-nanometer precision measurement and traceability methods have been widely used in scientific research and actual production. It enables humans to observe in real time The arrangement of individual atoms on the surface of objects has great application potential for nanoscale measurement, processing, information storage, etc. Now more and more modern measurement and processing require the measured data to have real-time precision traceability, but the accuracy and real-time stability of the measured precision data are often not known in actual ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B15/00
Inventor 刘红忠蒋维涛姜维丁玉成卢秉恒
Owner XI AN JIAOTONG UNIV
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