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Method for detecting micro lens fixed focus based on grating shear interference detection system

A detection method and interference detection technology, applied in the field of optical detection, can solve the problems of low measurement efficiency, high measurement cost, complicated operation, etc., and achieve the effect of simple and easy operation and high detection efficiency

Inactive Publication Date: 2013-01-23
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

This method can complete the fixed-focus detection of the microlens and its array elements through the change of the stripes; but the method is more complicated to operate, the measurement efficiency is low and the measurement cost is high
At the same time, due to the influence of the aberration of the microlens and its array elements, the measurement accuracy of this method is not high

Method used

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  • Method for detecting micro lens fixed focus based on grating shear interference detection system
  • Method for detecting micro lens fixed focus based on grating shear interference detection system
  • Method for detecting micro lens fixed focus based on grating shear interference detection system

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Embodiment Construction

[0039] The present invention will be further described in conjunction with accompanying drawing, figure 2Among them, a microlens fixed-focus detection method based on a grating shearing interference detection system, the detection system consists of a He-Ne laser 1, a condenser lens 2, a collimator 3, an aperture baffle 4, a microlens to be tested 5, a Lang Composed of an odd grating 6 and a CCD detector 7, the fixed-focus detection of the microlens 5 to be tested is completed through the fringe changes produced by the interference of the 0th order and the 1st order diffracted light of the Langchic grating 6, and the He-Ne laser 1 passes through the condenser lens 2 and After the collimator 3 collimates and expands the beam, it passes through the aperture baffle 4 and enters the measured microlens 5 with a plane wavefront. The method can complete the fixed-focus measurement of the measured microlens 5 through the following steps:

[0040] Step 1: Place the Langki grating 6 i...

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Abstract

The invention relates to a method for detecting micro lens fixed focus based on a grating shear interference detection system. The method belongs to the technical field of optical detection. The method achieves fixed focus measurement of a micro lens by use of fringes generated by zero-grade and first-grade diffraction light interference of Ronchi grating: when a parallel light passes through the Ronchi grating, zero-grade and first-grade diffraction light spots are generated due to a diffraction effect of the grating; according to a phase change in front of a diffraction light wave, when the grating is arranged on a micro lens focal plane, interference fringes in a light spot overlapping region can be avoided; when the grating is arranged at an out-of-focus position, the light spot overlapping region generates the interference fringes due to phase difference; defocusing amount of the grating can be calculated by a fringe periodic change at different defocusing positions, and thus the fixed focus measurement of the micro lens can be achieved. According to a physical optical theory, the method analyzes the relation between grating defocusing amount and a fringe cycle quantitatively, calculates the defocusing amount twice through difference of fringe cycles when the grating defocuses twice before and after focusing, thereby achieving fixed focus of the micro lens and array elements.

Description

technical field [0001] The invention belongs to the field of optical detection, and in particular relates to a microlens fixed-focus detection method based on a grating shear interference detection system, which can be used for precise fixed-focus measurement of microlenses and array elements thereof. Background technique [0002] Microlenses are widely used in the fields of optical collimation, optical information processing, optical computing, and optical interconnection due to their own advantages such as high diffraction efficiency, wide operating band, high degree of integration and miniaturization. With the improvement of micro-optical technology and the improvement of micro-processing technology, micro-lenses are developing towards the direction of miniaturization and arraying, and its important symbol is the emergence of micro-lens array components. The microlens array is the core component of the Hartmann-Shack wavefront sensor in the adaptive optics system, and its...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
Inventor 朱咸昌伍凡曹学东吴时彬
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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