Method for detecting micro lens fixed focus based on grating shear interference detection system

A detection method and interference detection technology, applied in the field of optical detection, can solve the problems of low measurement efficiency, high measurement cost, complicated operation, etc., and achieve the effect of simple and easy operation and high detection efficiency
CN102889980AInactive Publication Date: 2013-01-23INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
Publication Date
2013-01-23
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a method for detecting micro lens fixed focus based on a grating shear interference detection system. The method belongs to the technical field of optical detection. The method achieves fixed focus measurement of a micro lens by use of fringes generated by zero-grade and first-grade diffraction light interference of Ronchi grating: when a parallel light passes through the Ronchi grating, zero-grade and first-grade diffraction light spots are generated due to a diffraction effect of the grating; according to a phase change in front of a diffraction light wave, when the grating is arranged on a micro lens focal plane, interference fringes in a light spot overlapping region can be avoided; when the grating is arranged at an out-of-focus position, the light spot overlapping region generates the interference fringes due to phase difference; defocusing amount of the grating can be calculated by a fringe periodic change at different defocusing positions, and thus the fixed focus measurement of the micro lens can be achieved. According to a physical optical theory, the method analyzes the relation between grating defocusing amount and a fringe cycle quantitatively, calculates the defocusing amount twice through difference of fringe cycles when the grating defocuses twice before and after focusing, thereby achieving fixed focus of the micro lens and array elements.
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Description

technical field

[0001] The invention belongs to the field of optical detection, and in particular relates to a microlens fixed-focus detection method based on a grating shear interference detection system, which can be used for precise fixed-focus measurement of microlenses and array elements thereof. Background technique

[0002] Microlenses are widely used in the fields of optical collimation, optical information processing, optical computing, and optical interconnection due to their own advantages such as high diffraction efficiency, wide operating band, high degree of integration and miniaturization. With the improvement of micro-optical technology and the improvement of micro-processing technology, micro-lenses are developing towards the direction of miniaturization and arraying, and its important symbol is the emergence of micro-lens array components. The microlens array is the core component of the Hartmann-Shack wavefront sensor in the adaptive optics system, and its...

Claims

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