Four-dimensional adjusting platform for optical detection

Abstract

The invention provides a dour-dimensional adjusting platform for optical detection. The requirement for accurate multi-dimensional adjustment work is met. The platform comprises a base, a longitudinal placement platform, a transverse placement platform, a cloud deck seat, a cloud deck, a working platform, joints and corresponding adjusting mechanisms, wherein the base, the longitudinal placement platform, the transverse placement platform, the cloud deck seat, the cloud deck and the working platform are arranged sequentially from bottom to up, and the joints are in a pitching direction, a deflection direction, a horizontal transverse straight line direction and a horizontal longitudinal straight line direction respectively. The dour-dimensional adjusting platform is simple in structure and capable of achieving dour-dimensional adjusting and has high stability and adjusting accuracy.

Description

technical field [0001] The invention relates to a multi-dimensional adjustment platform for optical detection. Background technique [0002] In the process of optical inspection and assembly, various posture adjustment mechanisms are often used, such as translation tables, lifting tables, rotary tables, and angular displacement tables. At present, there are many companies dedicated to the research and development of such products in the domestic and foreign markets. These companies have many types of products, but most of their multi-dimensional adjustment platforms are small in size, which is difficult to meet the needs of medium-scale optical parts inspection and assembly. For a long time, the multi-dimensional adjustment tables used in the inspection and adjustment of mesoscale optical parts are all made of single-degree-of-freedom adjustment mechanisms through simple splicing. Although this barely meets the needs of the work, it brings many new problems, such as: The in...

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Problems solved by technology

[0002] In the process of optical inspection and assembly, various posture adjustment mechanisms are often used, such as translation tables, lifting tables, rotary tables, and angular displacement tables. At present, there are many companies dedicated to the research and development of such products in the domestic and foreign markets. These companies have many types of products, but most of their multi-dimensional adjustment platforms are small in size, which is difficult to meet the needs of medium-scale optical parts inspection and assembly.

For a long time, the multi-dimensional adjustment tables used in the inspection and adjustment of mesoscale optical parts are all made of single-degree-of-freedom adjustment mechanisms through simple splicing. Although this barely meets the needs of the work, it brings many new problems, such as: The interface forms of the degree of freedom adjustment mechanism are different, and it is difficult to match the interface when combined into a multi-degree-of-freedom adjustment mechanism; the stability of the multi-degree-of-freedom adjustment platform formed by simple splicing is poor, especially in the laser interferometry surface type detection due to the anti-interference of the adjustment mechanism Poor performance leads to interference fringe jitter, difficult data sampling, and reduced data reliability; at the same time, work efficiency is seriously affected

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