Device and method for obtaining mechanical loads on thrust elements
A technology of mechanical loads and equipment, applied in the testing of machine/structural components, measuring force, aircraft control, etc., can solve the problem of loss of function associated with landing flaps
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[0040] Figure 1a with 1b A component or body 2 to be inspected is shown, on which a dielectric layer 4 is arranged with a fixing layer 6 , wherein the fixing layer 6 can be equipped with a recessed structure 8 , such as a trench. The recessed structure can be produced using, for example, conventional dry or wet chemical etching techniques enabling particularly precise processing. The fixed layer 6 can be made of silicon, for example. The fixed layer 6 supports a carrier layer 10 on which the first electrode 12 , the second electrode 13 and the active layer 14 arranged between the first electrode 12 and the second electrode 13 are located.
[0041] The active layer 14 is made of a piezoelectric material, preferably aluminum nitride (AlN).
[0042] When excited via the first electrode 12 and the second electrode 13, the micro-bridge structure 16 is capable of performing oscillations by means of an alternating voltage source. If the frequency of the alternating voltage source...
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