Small-sized radial shearing interferometer based on four-step phase-shifting theory

A cutting interferometer and four-step phase-shifting technology, which is applied to instruments, scientific instruments, measuring devices, etc., can solve the problems of low phase extraction accuracy, complex phase extraction algorithm, and high difficulty of phase extraction, and achieve stable interferograms, reduce Small complexity and difficulty, obvious advantages

Active Publication Date: 2013-03-13
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
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Problems solved by technology

[0005] The technical problem to be solved by the present invention is: aiming at the disadvantages of the traditional radial shearing interferometer, such as complex phase extraction algorithm, high phase extraction difficulty, and low phase extraction accuracy, by

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  • Small-sized radial shearing interferometer based on four-step phase-shifting theory
  • Small-sized radial shearing interferometer based on four-step phase-shifting theory
  • Small-sized radial shearing interferometer based on four-step phase-shifting theory

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Embodiment Construction

[0029] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0030] Such as figure 1 As shown, the miniaturized radial shearing interferometer based on the four-step phase-shifting principle includes a polarizer P1, a polarization beam splitter prism PBS, and the focal lengths are f 1 and f 2 (f 1 ≠f 2 ) The first lens L1 and the second lens L2, and the beam reduction or beam expansion system composed of the first mirror M1 and the second mirror M2, the 1 / 4 wave plate QW, and the phase mask composed of the binary micropolarizer array Template (PhaseMask) and photosensitive device CCD camera. After the distorted beam W enters the miniaturized radial shearing interferometer based on the principle of four-step phase shifting, it first passes through the polarizer P1 and is divided by the polarizing beam splitter prism PBS into the reflected beam Beam1 whose polarization direction is along the horizontal...

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Abstract

The invention provides a small-sized radial shearing interferometer based on the four-step phase-shifting theory, comprising a polarizer (P1), a polarizing beam splitter (PBS), a beam reducer or expander system, a quarter-wave (QW) plate, a binary micro-polarizer array and a photosensor CCD (Charge-Coupled Device) camera, wherein the beam reducer or expander system comprises a first lens (L1) with the focus f1, a second lens (L2) with the focus f2 (f1 is not equal to f2), a first reflector (M1) and a second reflector (M2). According to the interferometer, an aberrated beam enters the small-sized radial shearing interferometer to form a pair of beams which are arranged on the same optical axis and have polarization directions vertical to each other and beam sizes reduced and expanded according to the same proportion, and the pair of beams are projected on the photosensitive surface of the CCD camera to form a single-frame interferogram after passing through a four-step phase shifter which comprises the quarter-wave plate (QW) and the binary micro-polarizer array. The small-sized radial shearing interferometer based on the four-step phase-shifting theory does not need a fully-flattened reference mirror, can be used in the field of wavefront sensing application such as adaptive optics, and can effectively suppress environmental disturbance due to the adoption of a complete common path structure, and has low environment requirements and stable interferogram.

Description

technical field [0001] The invention relates to the technical field of a wavefront sensor for wavefront measurement based on an interferometry, in particular to a miniaturized radial shear interferometer based on a four-step phase-shifting principle. Background technique [0002] Wavefront sensors based on the principle of interferometry have attracted extensive attention due to their high spatial resolution and high measurement accuracy. Typical interferometric wavefront sensors such as point diffraction interferometers, shearing interferometers, etc. Among them, the shearing interferometer has received a lot of research by researchers because of its high light energy utilization rate and common optical path structure to resist external interference. [0003] In the patent "Common-optical path direction shear interferometer based on four-step spatial phase shift structure. Patent application number: 201010034142.3", the author proposed a common optical path direction shear...

Claims

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Application Information

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IPC IPC(8): G01J9/02G02B27/28
Inventor 顾乃庭饶长辉
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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