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Novel heating system of sapphire crystal growing furnace

A sapphire crystal and heating system technology is applied in the field of structural design of a sapphire crystal growth furnace, which can solve the problems of long crystal growth cycle and high cost, and achieve the effects of low processing cost, stable performance and reduced time.

Inactive Publication Date: 2013-03-20
SUZHOU INDAL PARK JIESHITONG VACUUM TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a new sapphire crystal growth furnace heating system to solve the problems of long crystal growth period and high cost

Method used

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  • Novel heating system of sapphire crystal growing furnace
  • Novel heating system of sapphire crystal growing furnace
  • Novel heating system of sapphire crystal growing furnace

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Embodiment Construction

[0018] figure 1 As shown, the heating system of the sapphire crystal growth furnace includes an upper heating element 17, a middle heating element 8 and a bottom heating element 9. The three heating elements are fixed around the crucible 2, side heat shields 5, top heat shields 7 and bottom heat insulation Inside screen 6. In order to prevent temperature field changes caused by the aging of heat shields and other thermal field components and to facilitate customers' process experiments, the power of the three heating elements can be adjusted independently to form the temperature gradient required for crystal growth.

[0019] figure 2 , image 3 and Figure 4 As shown, the upper heating element is suspended on the electrode pile 12 on the furnace shell 1 through 6 electrode claws 16, and the middle heating element is the same as the upper heating element, and is supported on the electrode pile 12 on the furnace shell 1 through 6 electrode claws 16. . The bottom heating el...

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Abstract

The invention discloses a novel heating system of a sapphire crystal growing furnace. The heating system comprises an upper heating body, a middle heating body and a bottom heating body. The heating system is flexible in regulation, stable in performance and low in processing cost, facilitates process regulation of a user, greatly reduces the forming time of the process technology, and also reduces the production cost.

Description

technical field [0001] The invention relates to a structural design of a sapphire crystal growth furnace, in particular to a heating system. Background technique [0002] LED sapphire substrate processing technology has a history of decades abroad, but it has just begun in China. Since 2010, a large number of foreign sapphire crystal growth furnaces have been introduced into China. However, due to foreign technology blockade and insufficient domestic technical team construction, the domestic sapphire crystal growth technology has not been able to reach the ideal level. At present, the domestic sapphire crystal growth technology KY process is the mainstream, and the main imported equipment is equipment produced by various equipment manufacturers in Russia. This equipment uses a birdcage heating element. After the design of this heating element is completed, the temperature gradient of crystal growth has also been finalized. With the change of thermal field caused by the heat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/14C30B29/20
Inventor 滑喜宝
Owner SUZHOU INDAL PARK JIESHITONG VACUUM TECH
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