The invention belongs to the technical field of
chip manufacturing, and discloses a collecting device for a
chip manufacturing process, which comprises a shell and a collector positioned in the shell. According to the present invention, the first channel, the second channel, the third channel and the gas outlet
pipe are arranged in the housing; a gas mixture enters the first channel, firstly diffuses all around to enter the second channel, flows downwards along the second channel, enters the third channel from the side wall of the lower end of the collector and the bottom of the collector, flows upwards in the third channel, enters the upper end of the gas outlet
pipe, and finally flows downwards along the gas outlet
pipe to be discharged; the flow path of the gas mixture is reasonable, the
contact time of the gas mixture in the collecting device is long, and a good condensation collecting effect is achieved. According to the invention, the dependence on foreign imported equipment and parts is greatly reduced, the foreign technical monopoly is broken, and the production cost of chips in China is greatly reduced.