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Transmission electron microscope with near-field optical scanning function

A technology of electron microscope and near-field optics, applied to circuits, discharge tubes, electrical components, etc., to achieve low cost, change traditional thinking, and strong practicability

Active Publication Date: 2013-04-03
安徽泽攸科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, conventional transmission electron microscopes only have the function of structural characterization

Method used

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  • Transmission electron microscope with near-field optical scanning function
  • Transmission electron microscope with near-field optical scanning function
  • Transmission electron microscope with near-field optical scanning function

Examples

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Embodiment Construction

[0020] The present invention will be further described below in conjunction with specific examples.

[0021] Such as figure 1 and figure 2 Shown is the first embodiment of a transmission electron microscope with near-field optical scanning function according to the present invention. Viewed from another perspective, the first embodiment is to irradiate the sample with excitation light. A sample rod 7 is inserted in the transmission electron microscope body (not shown in the figure). The sample rod 7 is hollow and sealed with the transmission electron microscope lens barrel by a rubber sealing ring 19 . One end of the sample rod 7 is provided with a support frame 3, the support frame 3 is fixed with a sample holder 1 for loading samples, and the end of the sample rod 7 away from the sample holder 1 is blocked with an optical fiber vacuum flange 8 and a cable vacuum flange 9 , the internal vacuum environment of the transmission electron microscope body is isolated from the ou...

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Abstract

The invention relates to a transmission electron microscope with a near-field optical scanning function. The transmission electron microscope comprises a transmission electron microscope body. A sample rod is inserted on the transmission electron microscope body, a sample clamp for loading samples is arranged at one end of the sample rod which is hollow, a locating unit stretching to a sample is arranged in a rod body, an optical fiber probe for acquiring and leading in near-end signals is arranged on the locating unit, and the optical fiber probe is close to or attached to the sample by controlling the locating unit and in optical fiber connection with an exciting light source and / or an optical signal analyzer to achieve two-way transmission of the near-end signals. By means of the transmission electron microscope, conventional structure observation and representation is performed on samples through the transmission electron microscope, and near-field spectroscopy representation can be performed on the samples through the optical fiber probe simultaneously, accordingly, sample microstructures and optical properties are related one by one, the optical fiber probe with a metal coating can be further used for measuring sample electrical transport properties simultaneously, and the transmission electron microscope is an enormous expansion of transmission electron microscope functions.

Description

[0001] technical field [0002] The invention relates to a transmission electron microscope, especially a transmission electron microscope with near-field optical scanning function. [0003] Background technique [0004] The transmission electron microscope is a large-scale experimental setup for the characterization of the microstructure of materials, which can achieve atomic-level resolution. However, conventional transmission electron microscopes only have the function of structural characterization. Spectroscopy is another powerful means of material characterization, which is applicable to various samples such as physics, chemistry and even biomedicine. Generally, its spatial resolution ranges from macroscopic to mesoscopic. The near-field spectroscopy technology developed in recent years has improved the spatial resolution to the nanometer scale. How to combine spectroscopic techniques with transmission electron microscopy has become the focus of researchers' researc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/28H01J37/244
Inventor 许智白雪冬
Owner 安徽泽攸科技有限公司
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