Additive for acid texturing of diamond-wire-cutting polycrystalline silicon slices and application method thereof
A diamond wire cutting, polycrystalline silicon wafer technology, applied in chemical instruments and methods, crystal growth, post-processing details, etc.
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Embodiment 1
[0046] Embodiment 1 provides a comparative example, for not applying the conventional method of making wool of additive of the present invention:
[0047] Take the following steps:
[0048] 1) Prepare acidic texturing solution: under stirring, mix 2L of hydrofluoric acid with a concentration of 49%, 8L of nitric acid with a concentration of 65-68%, and 5L of deionized water;
[0049] 2) Texturing: immerse the diamond wire-cut polysilicon wafer in the above acidic texturing solution for texturing, and the texturing temperature is 7 o C, the texturing time is 90s.
[0050] The surface reflectance of the diamond wire cut polysilicon wafer after texturing is 27.0%. Figure 4 The scanning electron microscope pictures of the suede on the surface of the obtained diamond wire cut polysilicon wafer are given, and it can be known from the picture that the suede with uneven size and distribution is obtained.
Embodiment 2
[0052] Take the following steps:
[0053] a) Preparation of additives: under stirring, dissolve 1.0g of polyvinyl alcohol (commercial grade 0588) and 1.5g of polyethylene glycol (molecular weight 400) in 97.5g of deionized water (that is, in the prepared additive, The weight percentage of the polyvinyl alcohol is 1%, the weight percentage of the polyethylene glycol is 1.5%);
[0054] b) Preparation of acidic texturing solution: under stirring, mix 1.5L of hydrofluoric acid with a concentration of 49%, 8L of nitric acid with a concentration of 65-68% and 5.5L of deionized water, and then add 75mL of the above-mentioned additives , stir evenly (that is: in the prepared acidic texturing solution, the weight percentage of the hydrofluoric acid is 5%, the weight percentage of the nitric acid is 40%, the weight percentage of the additive 0.4%);
[0055] c), texturing: immerse diamond wire cut polysilicon wafers in the above acidic texturing solution for texturing, and the texturin...
Embodiment 3
[0058] Take the following steps:
[0059] a) Preparation of additives: under stirring, dissolve 2.0g of polyvinyl alcohol (commercial grade 1799) and 0.5g of polyethylene glycol (molecular weight 1000) in 97.5g of deionized water (that is, in the prepared additive, The weight percentage of the polyvinyl alcohol is 2%, the weight percentage of the polyethylene glycol is 0.5%);
[0060] b) Preparation of acidic texturing solution: under stirring, mix 2.5L of hydrofluoric acid with a concentration of 49%, 8.5L of nitric acid with a concentration of 65-68% and 4L of deionized water, and then add 130mL of the above-mentioned additives , stir evenly (that is: in the prepared acidic texturing solution, the weight percentage of the hydrofluoric acid is 8%, the weight percentage of the nitric acid is 42%, the weight percentage of the additive 0.7%);
[0061] c), texturing: immerse diamond wire cut polysilicon wafers in the above texturing liquid for texturing, and the texturing tempe...
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Abstract
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