A Control System of Automatic Chemical Etching Machine for Silicon Wafer

An automatic chemical and corrosion machine technology, applied in the direction of program control manipulators, manipulators, manufacturing tools, etc., can solve the problems of cumbersome procedures, corrosion of polishing sheets, etc., and achieve the effects of avoiding system failures, improving quality, and increasing pass rate

Active Publication Date: 2016-05-25
ZHONGHUAN ADVANCED SEMICON MATERIALS CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This leads to the need to adjust the different positions of the limit switch when corroding polishing sheets of different sizes, and the process is cumbersome

Method used

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  • A Control System of Automatic Chemical Etching Machine for Silicon Wafer
  • A Control System of Automatic Chemical Etching Machine for Silicon Wafer

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0014] Such as figure 1 As shown, the present invention comprises manipulator, is characterized in that: also comprises servo motor, servo motor driver, servo drive module and PLC controller, and described PLC controller is connected with described servo drive module, and described servo drive module also described servo drive module The motor driver is connected, the servo motor driver is connected to the motor, and the servo motor is connected to the manipulator.

[0015] The servo drive module is connected to the servo motor driver through an optical fiber transmission line.

[0016] The model of the servo motor driver is MR-J3-200B.

[0017] The model of the servo drive module is Qd75MH-1.

[0018] The working process of this example: based on the various requirements in the production process, set the operating parameters on the PLC controller, and the PLC controller reads these parameters to give instructions to the servo drive module; the instructions include the spee...

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PUM

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Abstract

The invention provides a control system for an automatic chemical silicon chip corroding machine, which comprises a manipulator and is characterized by further comprising a servomotor, a servomotor driver, a servo drive module and an PLC (Programmable Logic Controller ), the PLC is connected with the servo drive module, the servo drive module is further connected with the servomotor driver, the servomotor driver is connected with the servomotor, and the servomotor is connected with the manipulator. The control system provided by the invention has the benefit of accuracy in positioning, improves the quality of products processed by the chemical corroding machine, and increases the qualification rate.

Description

technical field [0001] The invention relates to the technical field of silicon wafer manufacturing equipment, in particular to a control system for an automatic chemical etching machine for silicon wafers. Background technique [0002] Chemical etching is a very important process in the manufacturing process of silicon wafers today. The mainstream equipment used in production today is all produced in Japan, which can basically meet the needs of production. But as the equipment is used in daily life, some deficiencies in the power control part and some unreasonable problems in the program will gradually appear. [0003] The handling system of the original rot machine is cylinder drive. The movement of the cylinder piston is controlled by controlling the on-off of the air valve, and the movement of the thread and the nut is used to achieve the effect of the movement of the mechanical arm. The braking part adopts optocoupler limit switches and safety hard limit blocks, and t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J9/18
Inventor 靳立辉王国瑞于书瀚张基龙
Owner ZHONGHUAN ADVANCED SEMICON MATERIALS CO LTD
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