A Control System of Automatic Chemical Etching Machine for Silicon Wafer

An automatic chemical and corrosion machine technology, applied in the direction of program control manipulators, manipulators, manufacturing tools, etc., can solve the problems of cumbersome procedures, corrosion of polishing sheets, etc., and achieve the effects of avoiding system failures, improving quality, and increasing pass rate
CN103144112BActive Publication Date: 2016-05-25ZHONGHUAN ADVANCED SEMICON MATERIALS CO LTD +1
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Patents(China)
Current Assignee / Owner
ZHONGHUAN ADVANCED SEMICON MATERIALS CO LTD
Publication Date
2016-05-25

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Abstract

The invention provides a control system for an automatic chemical silicon chip corroding machine, which comprises a manipulator and is characterized by further comprising a servomotor, a servomotor driver, a servo drive module and an PLC (Programmable Logic Controller ), the PLC is connected with the servo drive module, the servo drive module is further connected with the servomotor driver, the servomotor driver is connected with the servomotor, and the servomotor is connected with the manipulator. The control system provided by the invention has the benefit of accuracy in positioning, improves the quality of products processed by the chemical corroding machine, and increases the qualification rate.
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Description

technical field

[0001] The invention relates to the technical field of silicon wafer manufacturing equipment, in particular to a control system for an automatic chemical etching machine for silicon wafers. Background technique

[0002] Chemical etching is a very important process in the manufacturing process of silicon wafers today. The mainstream equipment used in production today is all produced in Japan, which can basically meet the needs of production. But as the equipment is used in daily life, some deficiencies in the power control part and some unreasonable problems in the program will gradually appear.

[0003] The handling system of the original rot machine is cylinder drive. The movement of the cylinder piston is controlled by controlling the on-off of the air valve, and the movement of the thread and the nut is used to achieve the effect of the movement of the mechanical arm. The braking part adopts optocoupler limit switches and safety hard limit blocks, and t...

Claims

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