A side-mounted fiber-coupled transmission electron microscope digital imaging method and device
A technology of transmission electron microscopy and digital imaging, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problems of not being able to use digital cameras and small spaces, and achieve the effects of reducing electron exposure dose, improving the performance of the whole machine, and improving sensitivity
Inactive Publication Date: 2015-10-14
FUZHOU GENERAL HOSPITAL OF NANJING MILITARY COMMAND P L A
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Problems solved by technology
Due to the narrow space of the 35mm camera interface 10 and 12 of the TEM, taking the Philips EM208-S TEM as an example, the installation space provided by it is 60mm wide and only 36mm high, see image 3 , can only accommodate a specially developed custom digital camera 32, but cannot take advantage of various types of high-performance digital cameras on the mature market
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[0027] Such as Figure 4~6 Shown, a kind of side-mounted optical fiber coupled transmission electron microscope digital imaging device comprises a transmission electron microscope, and the lens barrel 15 of the transmission electron microscope has two 35mm camera interfaces 10 and 12, wherein the 35mm camera interface 10 is connected with a vacuum-sealed casing, the described A digital imaging device 42 is arranged in the vacuum-sealed housing, and the digital imaging device 42 is connected with a fiber optic electron-optic converter 41 that transmits the transmitted electron image or diffraction pattern 11 of the sample to the outside of the lens barrel 15. 41 stretches into the lens barrel 15.
[0028]In this embodiment, the fiber optic electro-optic converter 41 includes a steering fiber 45 made of a fiber rod, and an aluminum conformal bracket is provided on the outside of the steering fiber 45 to facilitate its installation. The steering fiber 45 The optical input surfac...
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The invention relates to a digital imaging method and a device of a transmission electron microscope coupled with a side-mounted optical fiber. The method comprises the following steps of: (1) manufacturing an optical fiber electronic and optical converter; (2) integrally connecting the optical fiber electronic and optical converter with a digital imaging device; (3) mounting the optical fiber electronic and optical converter and the digital imaging device, which are integrally connected, in a vacuum closed shell; and (4) connecting the vacuum closed shell with a 35-mm camera interface of a lens cone of the transmission electron microscope so that the optical fiber electronic and optical converter stretches into the lens cone to transmit a transmission electronic image or a diffraction pattern of a sample out of the lens cone, and enough space is formed for containing or customizing the digital imaging device with a high performance. According to the digital imaging method and the device disclosed by the invention, the problems that the 35-mm camera interface of the existing transmission electron microscope has a narrow space so that a high-performance digital camera cannot be contained and the high-performance digital camera cannot be easily customized can be solved.
Description
technical field [0001] The present invention relates to a transmission electron microscope and an imaging method and device thereof, in particular to a transmission electron microscope imaging method for digitally recording a transmission electron image or a diffraction pattern of a sample through installation of a 35mm camera interface of a transmission electron microscope, optical fiber coupling, and its device. Background technique [0002] Such as figure 1 As shown, for a long time, people have observed the transmission electron image of the sample or the image of the diffraction pattern 11 on the main fluorescent screen 13 through the lead glass observation window 16. The bottom-mounted camera uses the bottom-mounted film 14 to record the sample information, or the side-mounted camera installed at the 35mm camera interface 10 and 12 of the transmission electron microscope takes the sample information. Since the 1990s, the application of TEM digital imaging devices has...
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IPC IPC(8): H01J37/22
Inventor 刘冰川陈自谦余英豪曲利娟刘庆宏
Owner FUZHOU GENERAL HOSPITAL OF NANJING MILITARY COMMAND P L A