Ion beam distribution
A technology of ion beam and ion sub-beam, applied in ion beam tube, ion implantation plating, vacuum evaporation plating, etc., can solve the problem of low efficiency of sputtering target use
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[0023] In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without these specific details. For example, although various features may be attributed to particular embodiments, it should be understood that features described with respect to one embodiment may be combined with other embodiments as well. Similarly, however, no feature or features of any described embodiment should be considered essential to the invention, as other embodiments of the invention may omit these features.
[0024] figure 1 An example block diagram of a beam steering ion beam system 100 is shown. Even though an embodiment of ion beam system 100 is implemented as an ion beam sputter deposition system, components of ion beam system 100 can be modified to implement ion beam etching systems,...
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