8 results about "Ion current density" patented technology

The present disclosure relates to an ion beam etching (IBE) system including a plasma chamber configured to provide plasma, a screen grid, an extraction grid, an accelerator grid, and a decelerator grid. The screen grid receives a screen grid voltage to extract ions from the plasma within the plasma chamber to form an ion beam through a hole. The extraction grid receives an extraction grid voltage, where a voltage difference between the screen grid voltage and the extraction grid voltage determines an ion current density of the ion beam. The accelerator grid receives an accelerator grid voltage. A voltage difference between the extraction grid voltage and the accelerator grid voltage determines an ion beam energy for the ion beam. The IBE system can further includes a deflector system having a first deflector plate and a second deflector plate around a hole to control the direction of the ion beam.

The present disclosure relates to an ion beam etching (IBE) system including a plasma chamber configured to provide plasma, a screen grid, an extraction grid, an accelerator grid, and a decelerator grid. The screen grid receives a screen grid voltage to extract ions from the plasma within the plasma chamber to form an ion beam through a hole. The extraction grid receives an extraction grid voltage, where a voltage difference between the screen grid voltage and the extraction grid voltage determines an ion current density of the ion beam. The accelerator grid receives an accelerator grid voltage. A voltage difference between the extraction grid voltage and the accelerator grid voltage determines an ion beam energy for the ion beam. The IBE system can further includes a deflector system having a first deflector plate and a second deflector plate around a hole to control the direction of the ion beam.

The invention provides a plasma propulsion dynamic torque measuring method, a plasma propulsion dynamic torque measuring device and electronic equipment, and relates to the field of plasma propulsion. Measuring first time-varying data of fluorescence intensity distribution in the beam of the thruster along with time and second time-varying data of plasma luminescence intensity of a space point in the beam along with time; adjusting different laser wavelengths and scanning fluorescence signals under different laser wavelengths, and obtaining a fluorescence intensity curve corresponding to the laser wavelengths through time axis alignment; calculating an ion velocity distribution function of each spatial point at each moment according to a fluorescence intensity curve corresponding to the laser wavelength, and calculating the ion current density; and an ion velocity distribution function in the other vertical direction is measured and synthesized to obtain a comprehensive average ion velocity, the dynamic torque density is calculated based on the comprehensive average ion velocity and the ion current density corresponding to each space point, and the dynamic torque is calculated based on the dynamic torque density.

The application provides a joint diagnosis data processing method and system based on Hall electric propulsion data, and relates to the field of space electric propulsion.The method measures the sensor resistance of an erosion sensor through a four-wire method resistance measurement circuit, and calculates the plume erosion rate based on the change rate of the sensor resistance, the material type of the erosion sensor and the geometric size; according to the material sputtering yield of the erosion sensor, the working medium and working voltage of the thruster, the bias voltage of the Faraday probe and the measurement interference data of the bias voltage on the plume erosion rate, the sensor resistance is measured through the four-wire method in a time sequence in a specified period, and the ion current density is measured through the Faraday probe in another time sequence in the specified period; and the plume power density distribution is calculated according to the plume erosion rate, the ion current density, the linearly fitted material sputtering rate function and the position of the joint collection structure in the plume.

The application provides a kind of plasma propulsion dynamic torque measurement method, device and electronic equipment, it is related to plasma propulsion field, the method calibrates the calibration relationship of total fluorescent intensity and ion current density of thruster, measures the first time-varying data of fluorescent intensity distribution in the beam current of thruster changes with time and the second time-varying data of plasma luminous intensity of spatial point in the beam current changes with time;Adjust different laser wavelength and scan fluorescent signal under different laser wavelength, obtain the fluorescent intensity curve corresponding to laser wavelength by time axis alignment;According to the fluorescent intensity curve corresponding to laser wavelength, calculate the ion velocity distribution function of each spatial point at each time, calculate ion current density;Measure another vertical direction ion velocity distribution function and synthesis, obtain comprehensive average ion velocity, based on the comprehensive average ion velocity and ion current density corresponding to each spatial point Calculation dynamic torque density and based on dynamic torque density calculation dynamic torque.

The invention provides a joint diagnosis data processing method and system based on Hall electric propulsion data, and relates to the field of space electric propulsion. The plume erosion rate is calculated based on the change rate of the sensor resistance, the material type of the erosion sensor and the geometric dimension; according to the material sputtering yield of the erosion sensor, the working medium and working voltage of the thruster, the bias voltage of the Faraday probe and measurement interference data of the bias voltage on the plume erosion rate, the erosion rate of the plume is calculated. Measuring the resistance of the sensor by using a four-wire method in a time sequence in a specified period and measuring the ion current density by using a Faraday probe in another time sequence in the specified period; and calculating plume power density distribution according to the plume erosion rate, the ion current density, the linearly fitted material sputtering rate function and the position of the joint acquisition structure in the plume.

The invention relates to the technical field of spaceflight electric propulsion, in particular to an electric thruster thrust vector direction measurement method, which comprises the following steps of: 1, measuring ion current density distribution on a beam vertical section of an electric thruster by adopting a Faraday probe array; step 2, calculating to obtain a beam radius containing 90% of beam current; 3, determining a beam emission source point according to the beam radius containing 90% of beam current, and establishing a global coordinate system and a beam current vector; and 4, calculating according to the beam current vector to obtain a thrust vector direction. The Faraday probe array is adopted to measure the ion current density distribution on the beam current vertical section of the electric thruster, the thrust vector direction is calculated based on the beam current vector by measuring the beam current density distribution, the measurement process is simple, and the calculation method is visual, simple and convenient.

A method for controlling a voltage of a target in a plasma apparatus having a structure in which an electrode, a dielectric, and the target are stacked includes applying an applied voltage VG of a bipolar pulse to the electrode to find a maximum time tmax at which current flowing through the electrode becomes zero in a negative voltage region and calculating ion current density Ji incident on the target exposed to plasma using the maximum time tmax.