The application discloses a kind of thin film
nitric oxide sensor and preparation method, preparation method includes: water-soluble
zinc salt is mixed with water and is obtained A solution;2-methylimidazole, CTAB and water are mixed and obtained B solution;A solution and B solution are mixed and obtained reaction liquid, MOFs material is obtained by
hydrothermal reaction;In reaction liquid, the
mass fraction of CTAB is 0.01-0.1%;MOFs material is calcined and obtained
zinc oxide nanomaterial, is dissolved in
terpineol, after stirring, obtained
slurry, add to
silicon piece, then carry out glue, after glue, dry, anneal and obtain annealing device;Annealing device is welded, packaged and obtained the thin film
nitric oxide sensor in the present application Surfactant (CTAB) is used to control the shape and size of MOFs particle, so that gas sensor has high sensitivity and selectivity;Meanwhile, the
working temperature of the gas sensitive material is low, and the
energy consumption is also low, which can be used for
nitric oxide gas detection.