The invention relates to a
single crystal furnace shutdown rapid cooling method, which is mainly used for rapidly cooling the interior of a furnace body after
single crystal growth is finished, and comprises the following steps: extracting residual gas in the
single crystal furnace and treating the residual gas; the treated gas is conveyed back into the single
crystal furnace; and the steps are alternated until the temperature of the extracted gas meets the requirement. According to the method, the hot air flow in the furnace body of the single
crystal furnace after furnace shutdown is recycled, the hot air flow is sequentially subjected to filtering treatment, cooling treatment and heat exchange treatment to reach the standard that the hot air flow can be introduced into the single
crystal furnace for use, and then the treated air flow is introduced into the furnace body of the single crystal furnace so as to achieve the purpose of quickly cooling a thermal field, shorten the furnace shutdown
cooling time and improve the production efficiency. The unit capacity is increased, and the effects of increasing the yield and increasing the efficiency are achieved. Meanwhile, the auxiliary chamber is pressurized by replacing
inert gas
argon with filtered gas, so that the
working hours of equipment are reduced, the working efficiency is improved, and the use amount of
argon is reduced; the working efficiency can be improved, the effect of increasing production and efficiency is achieved, and
automation is achieved.