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A kind of deplating method of titanium nitride film layer

A technology of titanium nitride film and titanium nitride, which is applied in the field of stripping of titanium nitride film, can solve the problems such as can no longer meet the requirements of hanging workpieces and can not be used continuously, and achieves high practical value, convenient operation and easy operation. effect of implementation

Active Publication Date: 2016-02-17
NANKAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] While coating the workpiece, ceramic rods used for stringing, hanging tools and other workpieces, as well as ceramic beads used to increase gas distribution points in vapor deposition, will also be coated with a titanium nitride film layer. After long-term use, the ceramic The diameter of the rod or ceramic bead continues to increase, and the titanium nitride coating on its surface can reach a thickness of 1mm, which can no longer meet the requirements of hanging the workpiece and cannot continue to be used

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] A method for deplating a titanium nitride film layer, the steps are as follows:

[0018] 1) Physical treatment

[0019] Heat 30 discarded ceramic rods (the diameter of the original ceramic rod is about 9mm, the rod length is 130mm, and the thickness of the titanium nitride film is 1mm) in an electric furnace at 400°C for 90 minutes, and then immediately put it into a deionized quenching in water;

[0020] 2) Etching operation

[0021] Use a graduated cylinder to measure HNO with a mass percentage concentration of 65% 3 Mix 50mL of solution and 150mL of HF solution with a concentration of 40% by mass, mix them evenly, place them in a polytetrafluoroethylene reactor, put them into a physically treated ceramic rod, and heat at 70°C for 4 hours;

[0022] 3) Take out the ceramic rod from the acid solution, and clean the etched titanium nitride film with cold water.

[0023] The deplating effect of the finished ceramic rod is good, and it can be used for stringing and han...

Embodiment 2

[0025] A method for deplating a titanium nitride film layer, the steps are as follows:

[0026] 1) Physical treatment

[0027] Heat 500g of discarded ceramic beads (the diameter of the original ceramic beads is 6mm, the thickness of the titanium nitride film is 1mm) in an electric furnace at 450°C for 100 minutes, and then immediately put it into 20°C deionized water to quench;

[0028] 2) Etching operation

[0029] Use a graduated cylinder to measure HNO with a mass percentage concentration of 68% 3 Mix 100mL of solution and 300mL of HF solution with a concentration of 40% by mass, mix them evenly, place them in a polytetrafluoroethylene reactor, put in physically treated ceramic beads, and heat at 70°C for 4 hours;

[0030] 3) Take out the ceramic beads from the acid solution and wash the etched titanium nitride film with cold water.

[0031] The treated ceramic bead titanium nitride film is completely removed and can be used as a filler in the original process to increas...

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PUM

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Abstract

The invention discloses a titanium nitride film deplating method, which implements deplating treatment on a titanium nitride film by a physical and chemical combination way, wherein the treatment process includes physical treatment and etching treatment; the physical treatment is realized by heating a titanium nitride film deplating piece to a certain temperature, and immediately quenching in cold water to cool the deplating piece; and the etching treatment comprises the following steps: heating the cooled deplating piece in mixing acid, implementing the etching treatment, cooling the deplating piece after etching treatment, and flushing by water to remove a titanium nitride film on the surface. The deplating method disclosed by the invention has the advantages that the titanium nitride film deplating method is simple in process, convenient to operate and easy to implement; and titanium nitride film deplating is implemented on plated inferior product and plating auxiliary pieces which cannot be used, to reuse the inferior product and the auxiliary pieces, so that production cost is greatly reduced and a comparatively high practical value is guaranteed.

Description

technical field [0001] The invention relates to a coating and deplating process for cutting tools, drilling tools and auxiliary parts in mechanical processing, in particular to a deplating method for titanium nitride film layers. technical background [0002] Titanium nitride film is a layer of titanium nitride film coated on the surface of the workpiece by physical vapor deposition (PVD) or chemical vapor deposition (CVD). The titanium nitride film has high hardness, good wear resistance, Small friction coefficient and other advantages. In the 1970s, this coating technology was widely used in the surface treatment of cutting tools and drill bits, which triggered a cutting tool revolution. [0003] However, in the production process of cutting tools, due to reasons such as not strict control of process conditions, the coated film layer does not meet the quality requirements, resulting in defective products. In order to save costs, it is necessary to de-coat the defective p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23F1/30
Inventor 于宏兵耿丽娟
Owner NANKAI UNIV