A kind of deplating method of titanium nitride film layer
A technology of titanium nitride film and titanium nitride, which is applied in the field of stripping of titanium nitride film, can solve the problems such as can no longer meet the requirements of hanging workpieces and can not be used continuously, and achieves high practical value, convenient operation and easy operation. effect of implementation
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Embodiment 1
[0017] A method for deplating a titanium nitride film layer, the steps are as follows:
[0018] 1) Physical treatment
[0019] Heat 30 discarded ceramic rods (the diameter of the original ceramic rod is about 9mm, the rod length is 130mm, and the thickness of the titanium nitride film is 1mm) in an electric furnace at 400°C for 90 minutes, and then immediately put it into a deionized quenching in water;
[0020] 2) Etching operation
[0021] Use a graduated cylinder to measure HNO with a mass percentage concentration of 65% 3 Mix 50mL of solution and 150mL of HF solution with a concentration of 40% by mass, mix them evenly, place them in a polytetrafluoroethylene reactor, put them into a physically treated ceramic rod, and heat at 70°C for 4 hours;
[0022] 3) Take out the ceramic rod from the acid solution, and clean the etched titanium nitride film with cold water.
[0023] The deplating effect of the finished ceramic rod is good, and it can be used for stringing and han...
Embodiment 2
[0025] A method for deplating a titanium nitride film layer, the steps are as follows:
[0026] 1) Physical treatment
[0027] Heat 500g of discarded ceramic beads (the diameter of the original ceramic beads is 6mm, the thickness of the titanium nitride film is 1mm) in an electric furnace at 450°C for 100 minutes, and then immediately put it into 20°C deionized water to quench;
[0028] 2) Etching operation
[0029] Use a graduated cylinder to measure HNO with a mass percentage concentration of 68% 3 Mix 100mL of solution and 300mL of HF solution with a concentration of 40% by mass, mix them evenly, place them in a polytetrafluoroethylene reactor, put in physically treated ceramic beads, and heat at 70°C for 4 hours;
[0030] 3) Take out the ceramic beads from the acid solution and wash the etched titanium nitride film with cold water.
[0031] The treated ceramic bead titanium nitride film is completely removed and can be used as a filler in the original process to increas...
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