Thin film transistor liquid crystal display (TFT-LCD) array substrate and manufacturing method thereof

Abstract

The invention discloses a thin film transistor liquid crystal display (TFT-LCD) array substrate which comprises a scanning line and data lines, and the scanning line and the data lines are formed on the substrate. A pixel electrode and a thin film transistor are formed in a pixel region defined by the scanning line and the data lines. The thin film transistor comprises a grid electrode connected with the scanning line, a source electrode connected with the data lines, a drain electrode connected with the pixel electrode, and a semiconductor layer of the thin film transistor. The semiconductor layer of the thin film transistor is formed between the source electrode and the drain electrode. A storage electrode is further formed in the pixel region, and the storage electrode and the pixel electrode jointly form a storage capacitor. The storage electrode and the semiconductor layer of the thin film transistor are made of transparent indium gallium zinc oxide (IGZO) materials. The storage electrode and the semiconductor layer of the thin film transistor are subjected to ion implantation treatment which is completed in the same manufacturing process. On the condition of not increasing a photomask manufacturing process and materials, the TFT-LCD array substrate achieves the goal of utilizing the IGZO materials to transparently store the electrodes, greatly improves the aperture ratio of pixel, and meets the requirements of the industry for image quality.

Description

technical field [0001] The invention relates to a thin film transistor liquid crystal display structure and a manufacturing method thereof, in particular to a TFT-LCD array substrate and a manufacturing method thereof. Background technique [0002] Thin Film Transistor Liquid Crystal Display (TFT-LCD for short) has the characteristics of small size, low power consumption, and no radiation, and has been developed rapidly in recent years. [0003] As customers have higher and higher requirements for display quality, the resolution of liquid crystal displays continues to increase, but the demand for environmental protection and energy saving is also increasing. In order to meet the current trend, the aperture ratio of the display needs to be increased. The technical solution of CN101819361A disclosed on September 1, 2010 is to form a storage electrode composed of a transparent conductive film in the pixel area to form a structure in which the storage capacitor is on the transpa...

AI Technical Summary

Problems solved by technology

However, an additional process of transparent electrodes is added to the manufacturing process of the TFT-LCD array substrate. The manufacturing process is complicated and requires an increase in the number of masks and the consumption of materials.

higher cost

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