Device and method for recovery, purification and reusing of high-purity HE(helium) in crystal growth
A crystal growth and high-purity technology, which is applied in the field of high-purity HE recovery, purification and reuse devices, can solve problems such as constraints and achieve the effect of saving production costs
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[0016] The technical solution of the present invention is further described below in conjunction with the accompanying drawings, but the scope of protection is not limited to the above.
[0017] Such as figure 1 , The recovery, purification and reuse device of high-purity HE during crystal growth, which includes gas booster pump 1, first gas storage tank 2, oil and gas filter 3, molecular sieve 4, second gas storage tank 5, ultra-low temperature adsorption cold pump 6. The regenerator 7, the gas detector 8, the third gas storage tank 9 and the PLC controller 10, wherein the inlet end of the gas booster pump 1 is connected to the outlet of the mechanical pump of the crystal production furnace 11 through a ventilation control valve Above, the gas outlet end of the third gas storage tank 9 is connected to the production gas interface of the crystal production furnace 11, and the connection between the gas outlet end of the gas booster pump 1 and the gas inlet end of the third gas st...
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