Diamond Abrasives and Electroplated Diamond Tools

Abstract

The invention relates to a diamond abrasive and an electroplated diamond tool. Through a film coating mode, the surface of the diamond abrasive is modified, a conducting layer is covered on the surface of the diamond abrasive, wherein, a metal component with composition gradient enables the surface of the diamond abrasive to have micro conductivity, and the conducting layer has increasing electric conductivity along the external direction of the surface of the diamond abrasive, so that an electroplated layer can more effectively coat the diamond abrasive while electroplating for increasing the adhesive force of the diamond abrasive and a tool base.

Description

technical field [0001] The invention relates to a diamond abrasive, in particular to a diamond abrasive and an electroplated diamond tool with micro-conductivity. Background technique [0002] At present, diamond tools are widely used in 3C manufacturing industry, traditional manufacturing industry, aviation titanium industry or general grinding fields, such as metal cutting, workpiece grinding or mirror polishing; and these diamond grinding tools are mostly through Manufactured by electroplating. [0003] With the development of science and technology, precision diamond abrasive grinding tools are widely used in high-tech industries, such as the polishing pad conditioner (Pad Conditioner) used in chemical mechanical polishing (CMP) in the semiconductor technology industry , that is to fix and combine the diamond abrasive on a metal substrate. In addition to the known brazing method, the bonding method also uses electroplating. If the surface of the diamond abrasive can hav...

AI Technical Summary

Problems solved by technology

However, this method cannot effectively fix the diamond abrasive on the surface of the grinding tool, so it is very likely to cause the diamond abrasive to fall off during the grinding process. If it occurs in the CMP process, it will cause scratches on the wafer; If the abrasive falls off, the thickness of the electroplating layer must be increased to increase the coating degree of the coating on the diamond abrasive, which will reduce the height of the diamond abrasive exposed to the coating and affect the overall cutting ability

[0006] Although there are commercial diamond abrasives on the market with metal coatings on the surface, such as titanium or nickel plating, these pure metal coatings are too conductive. If such diamond abrasives coated with metal are used on electroplated diamond tools, Due to the high conductive plating, it is easy to cause diamond abrasives to form agglomerates during the plating process, which will affect the surface accuracy or appearance of diamond tools, etc.

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