Energy-saving temperature controlling heating stage and constant temperature controlling method thereof

Abstract

The invention relates to an energy-saving temperature controlling heating stage and a constant temperature controlling method of the energy-saving temperature controlling heating stage. The energy-saving temperature controlling heating stage and the constant temperature controlling method of the energy-saving temperature controlling heating stage solve the problems that a conventional temperature controlling box is slow in temperature increase and temperature of a conventional electric heating plate can not be stably controlled. The energy-saving temperature controlling heating stage comprises a thermal insulation box cover, a heating cavity and an electric control operation box, wherein the thermal insulation box cover, the heating cavity and the electric control operation box are sequentially connected from top to bottom. A heating device and a soaking plate are arranged in the heating cavity. The upper surface of the heating device is tightly connected with the lower surface of the soaking plate. Heat insulating and preserving materials are filled in a cavity of the lower surface of the heating device. An automatic sealed ring controlling regulator, a heating switch, a power supply switch and a fuse cutout are arranged on the electric control operation box.

Description

technical field [0001] The invention relates to an energy-saving temperature-controlled heating platform and a constant temperature control method thereof, belonging to the field of energy conservation. Background technique [0002] In the manufacturing process of microelectronic devices and optoelectronic devices, the coating and photolithography process are very critical links. The photoresist is baked at a certain temperature to harden the film; the wafer is boiled and cleaned with ethanol or acetone, and the wafer is ground before grinding. The melting wax paste between the grinding head and the low-temperature vulcanization treatment of chemical materials need to be completed in a clean and stable low-temperature environment. [0003] Traditional heating and baking uses ordinary low-temperature ovens, ordinary electric heating plates or electric hobs, all of which have serious defects, some of which have poor process effects, some are inconvenient to use, and some are a...

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Problems solved by technology

[0006] Aiming at the deficiencies in the prior art, the present invention provides a practical, long-acting, flexible, convenient, excellent performance and energy-saving small automatic temperature-controlled heating table and its constant temperature control method, which solves the problem of slow temperature rise in ordinary ovens and the temperature of ordinary electric heating plates. The problem of unstable control

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