MEMS Fabry-Perot cavity tunable filter

Abstract

The invention discloses an MEMS Fabry-Perot cavity tunable filter. The MEMS Fabry-Perot cavity tunable filter is characterized by comprising a thermal-insulation external box (1), a sealed internal box (2), thermal-insulation materials (3) filled between the thermal-insulation external box (1) and the sealed internal box (2), damping materials (4) surrounding the sealed internal box (2), a metal fixed base (5) fixed on the undersurface of the sealed internal box (2), an incidence end double optical fiber contact pin (6), an incidence end collimating lens (7), a first heating power resistor (8), an MEMS Fabry-Perot cavity chip (9), a second heating power resistor (11), an outgoing end collimating lens (12), an outgoing end double optical fiber base pin (13) and a thermal resistor (10), wherein the incidence end double optical fiber base pin (6), the incidence end collimating lens (7), the first heating power resistor (8), the MEMS Fabry-Perot cavity chip (9), the second heating power resistor (11), the outgoing end collimating lens (12) and the outgoing end double optical fiber base pin (13) are fixed on the metal fixedseat (5), and the thermal resistor (10) is fixed on the MEMS Fabry-Perot cavity chip (9). The MEMS Fabry-Perot cavity tunable filter has the advantages of being small in size, fast in tuning, continuously-adjustable, high in fineness, narrow in bandwidth, wide in free spectral domain and tuning range, good in thermal stability, low in cost and the like.

Description

technical field [0001] The invention relates to a MEMS Fabry-Perot cavity tunable filter, which belongs to the technical field of optical communication and optical fiber sensing. Background technique [0002] Optical fiber communication technology has become an important part of modern communication. With the rapid development of network and data communication, there is an increasing demand for high-speed and large-capacity transmission in optical communication. Dense wavelength division multiplexing (DWDM) technology can improve the transmission efficiency of optical communication. Tunable filter is an indispensable device in optical wavelength division multiplexing technology, and it is also one of the key technologies of optical communication all-optical network. A good-quality optical tunable filter should have a wide free spectrum to accommodate more channels, narrow bandwidth to allow small channel spacing, fast wavelength switching speed and good wavelength stability ...

AI Technical Summary

Problems solved by technology

[0020] In summary, the optical fiber interference Fabry-Perot filter uses the piezoelectric effect, and the device is too large. The acousto-optic tunable filter uses the acousto-optic effect, and the switching speed is slow. Structural filters and liquid crystal FP cavity tunable filters have the problem of narrow tuning range, which cannot meet the increasing requirements of optical communication.

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