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Microwave liquid phase plasma generator

A technology of liquid phase plasma and generating device, which is applied in the direction of plasma and electrical components, can solve the problems of chemical vapor deposition limitation and high water vapor application field limitation, and achieve the effect of improving conductivity, flexible design and easy disassembly

Active Publication Date: 2013-08-28
DALIAN MARITIME UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The main way of plasma generation in the traditional concept is gas physical discharge such as glow discharge, arc discharge, and microwave gas discharge in the gas phase. Restricted
Because microwave discharge plasma has the characteristics of large spatial distribution and relatively high density, it is widely used in plasma deposition and other fields. Extinguished, limited for high water vapor applications
In addition, the application of gas-phase plasma in liquid phase has always been an important issue that has troubled experts at home and abroad due to the problem of gas-liquid conversion efficiency.

Method used

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  • Microwave liquid phase plasma generator
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  • Microwave liquid phase plasma generator

Examples

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Embodiment Construction

[0018] like figure 1 , figure 2 , image 3 and Figure 4 A microwave liquid phase plasma generating device shown includes: a microwave discharge electrode, a fixed plate 6 and a microwave input joint; the bottom end of the microwave discharge electrode is flexibly connected to the top of the microwave input joint through the fixed plate 6; the microwave discharge The electrode is composed of an axially parallel electrode inner conductor 1, a ceramic tube 2 and an electrode outer conductor 4 sequentially from inside to outside; the ceramic tube 2 is sleeved on the outer wall of the electrode inner conductor 1; the ceramic tube 2 and the electrode outer conductor The gaps between the conductors 4 are evenly filled with silica gel 3; the top end of the ceramic tube 2 is flush with the top end of the electrode inner conductor 1 and higher than the top end of the electrode outer conductor 4; The parallel input joint inner conductor 8, the sealing and fixing block 9 and the inpu...

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Abstract

The invention discloses a microwave liquid phase plasma generator comprising a microwave discharge electrode, a fixed disk and a microwave input connector, wherein the bottom end of the microwave discharge electrode is movably connected with the top end of the microwave input connector through the fixed disk, the microwave discharge electrode is sequentially composed of an electrode inner conductor, a ceramic pipe and an electrode outer conductor from interior to exterior, the electrode inner conductor, the ceramic pipe and the electrode outer conductor are parallel in the axial direction, the ceramic pipe is sleeved on the outer side wall of the electrode inner conductor, and silicon gel is evenly filled in the gap between the ceramic pipe and the electrode outer conductor. The microwave input connector is sequentially composed of an input connector inner conductor, a sealing fixing block and an input connector outer conductor from interior to exterior, the input connector inner conductor, the sealing fixing block and the input connector outer conductor are parallel in the axial direction, and the input connector inner conductor is connected with the input connector outer conductor in a sealing mode through the sealing fixing block. The microwave liquid phase plasma generator is not only convenient to detach, but also easy to operate; meanwhile, through adjusting of the length of the ceramic pipe, adjusting of impedance of the discharge electrode can be achieved, and impedance matching of the discharge electrode and a feeder line is good.

Description

technical field [0001] The invention relates to a microwave liquid phase plasma generating device. Background technique [0002] Plasma is the fourth state of matter, and it is widely used in environmental protection and material synthesis because it contains high-energy active particles. The main way of plasma generation in the traditional concept is gas physical discharge such as glow discharge, arc discharge, and microwave gas discharge in the gas phase. There are restrictions. Because microwave discharge plasma has the characteristics of large spatial distribution and relatively high density, it is widely used in plasma deposition and other fields. Extinguished, limited for high water vapor applications. In addition, the application of gas-phase plasma in liquid phase has always been an important problem that has plagued experts at home and abroad due to the problem of gas-liquid conversion efficiency. In recent years, many experts at home and abroad strive to genera...

Claims

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Application Information

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IPC IPC(8): H05H1/46
Inventor 孙冰王波朱小梅严志宇
Owner DALIAN MARITIME UNIVERSITY
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