Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same

A tuning filter, F-P technology, applied in the field of micro-electromechanical systems, can solve the problems of unfavorable production of F-P devices, no integrated process, high requirements, and achieve the effects of large deformation, large tuning range and fast response speed.

Inactive Publication Date: 2013-09-11
HUAZHONG UNIV OF SCI & TECH +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These production equipment requirements are high, which is not conducive to the production of F-P devices by units with

Method used

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  • Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same
  • Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same
  • Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0060] Figure 4 It is a top view of an array-type micro F-P cavity tunable filter provided by an embodiment of the present invention; Figure 4 It can be concluded that the light leakage area is small, so that the fill factor of the tunable filter is high, and the optical performance of the tunable filter is good.

[0061] The core part of the filter unit of the micro FP cavity tunable filter provided by the embodiment of the present invention is a cantilever beam micro bridge and a movable diaphragm (micro bridge deck), and the upper reflector is jointly supported and suspended by the cantilever beam micro bridge and the movable diaphragm. Above the lower reflector, the fixed diaphragm and the movable diaphragm of the filter substrate are DBR. When different voltages are applied between the fixed diaphragm and the movable diaphragm, the electrostatic force generated between the two acts on the cantilever micro-bridge, The upper mirror is moved downward to change the cavity lengt...

Example Embodiment

[0096] Example 1: Design a 3~5um infrared F-P cavity tunable filter array based on MEMS technology using the above scheme. This filter adopts a thin film micro-bridge structure, has the advantages of large tuning range and fast response speed, and is prepared by an integrated process. Table 1 is the design parameter table of the infrared 3~5um F-P cavity tunable filter array.

[0097]

[0098] Table 1

[0099] The specific process of the designed 3~5um infrared micro F-P cavity tunable filter array is as follows Figure 8 As shown, the preparation method specifically includes:

[0100] (1) Clean the surface of the substrate and perform surface activation treatment;

[0101] (2) Prepare the first Bragg reflector 3, and coat the other side with an anti-reflection coating;

[0102] (3) Fabricate the first electrode 4 and the second electrode 5 on the surface coated with the first Bragg reflector 3; spin-coated AZ5214 glue on the surface of the DBR to form an AZ5214 glue film, and perform...

Example Embodiment

[0111] Example 2: In the design of Scheme 1, the spectrum range for mid-wave infrared detection is 3~5um, and in visible light imaging, the detection spectrum range is 600-800nm, which is not applicable to the original design of DBR and antireflection coating, and The length of the FP cavity needs to be changed to reduce the difficulty of the preparation process.

[0112] Table 2 Design parameter table of F-P cavity tunable filter array for detecting visible light and detecting spectral range of 600-800nm

[0113]

[0114] Table 2

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Abstract

The invention discloses a miniature F-P (Fabry-Perot) cavity tunable filter and a method for manufacturing the same. The miniature F-P cavity tunable filter comprises a substrate. An antireflection film is attached to one surface of the substrate, a first bragg reflector is attached to the other surface of the substrate, and a first electrode and a second electrode are attached onto the first bragg reflector; four metal piers are attached onto the first electrode, and a bridge surface is attached onto the four metal piers; the bridge surface comprises four cantilever beams and a movable diaphragm, each cantilever beam is L-shaped, one end of each cantilever beam is perpendicularly fixedly connected with the corresponding metal pier, and the other end of each cantilever beam is connected with the movable diaphragm; the movable diaphragm is square, and a second bragg reflector is inlaid in the center of the movable diaphragm; the first bragg reflector and the second bragg reflector form a resonant cavity of an F-P cavity; after the miniature F-P cavity tunable filter is powered on, the four cantilever beams elastically deform and can drive the movable diaphragm and the second bragg reflector to move in the direction perpendicular to the first bragg reflector, so that the length of the resonant cavity is changed, and a tunable function of the filter is realized. The miniature F-P cavity tunable filter and the method have the advantage that the filter is wide in tunable range and high in response speed.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems, and more specifically relates to a micro F-P cavity tunable filter and a preparation method thereof. Background technique [0002] Hyperspectral imager research is a new topic in the field of imaging spectroscopy technology. It can obtain tens to hundreds of channel spectral images in narrow-band spectral bands with adjacent wavelengths and continuous sampling. Using this high spectral resolution Ultra-multispectral image data can identify many objects on the earth's surface according to their spectral characteristics, and has extremely high application value in economic construction and military affairs. [0003] The spectroscopic method of the traditional imaging spectrometer is to use dispersive elements such as prisms, gratings or Fourier transform spectrometers, and different spectra are imaged on different detectors. It is difficult to meet the needs of high spatia...

Claims

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Application Information

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IPC IPC(8): G02B26/00B81C1/00
Inventor 蒙庆华陈四海赖建军黄光吕超鸿黄鹰
Owner HUAZHONG UNIV OF SCI & TECH
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