Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method

Abstract

The invention relates to a piezoelectric-ceramics-based high-speed high-precision macro-micro platform and a switching method. The macro-micro platform comprises a platform base plate and a voice coil motor, wherein the platform base plate is disposed on a vibration isolation pedestal, the voice coil motor is disposed at one side of the platform base plate, and the voice coil motor comprises a voice coil motor shell, a voice coil motor magnet assembly, a voice coil motor coil, a voice coil motor linearity encoder and a motor shaft connecting rack. Because the voice coil motor is used to drive the platform to feed in a large stroke and a high speed, and a piezoelectric ceramics is directly connected with an output shaft of the voice coil motor, the macro-micro platform is compact in structure and easy to feedback control. Additionally, the platform is provided with the piezoelectric ceramics which plays a vibration damping effect on the high-speed motion platform by applying an opposite acting force, so that the problem that the high-acceleration motion platform is large in vibration and hard to be stable rapidly; and after the platform is stable, the piezoelectric ceramics switches functions for driving the micro platform to move, and by closed ring control of an absolute grating, the precision positioning of platform micro motion is realized.

Description

technical field [0001] The invention relates to a high-speed, high-precision macro-micro platform based on piezoelectric ceramics and a switching method, and belongs to the transformation technology of the high-speed, high-precision macro-micro platform based on piezoelectric ceramics. Background technique [0002] The high-quality and high-capacity manufacturing of microelectronic products depends on the balance between high-precision positioning and high-acceleration motion of key mechanisms. High-precision and high-acceleration motion and positioning can be realized by compound motion combining macro and micro motion. Similar research has been done at home and abroad. However, the core issues such as the switching mechanism and behavior description of macro-micro composite high-speed motion and its subsystem motion, including mathematical description, vibration behavior, motion characteristics, and stability evaluation, have not been effectively resolved. The structural ...

AI Technical Summary

Problems solved by technology

In addition, the actuator system generated by micro-nano motion involves coupling modeling of multiple physical fields such as electricity, magnetism, mechanism, and functional materials. The mechanism of micro-nano precision generation based on functional materials under micro-composite motion conditions, especially the physical nature and influence of material properties, structural dimensions and composition on nonlinear hysteresis, creep and drift effects, has been limited by the lack of related theories. The accuracy of the high-speed motion platform

Images