Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method

A piezoelectric ceramic and high-precision technology, which is applied in the field of high-speed and high-precision macro-micro platforms and switching based on piezoelectric ceramics, can solve the problems of limiting the accuracy, constraints and influence of high-speed motion platforms, and achieve simple and light mechanical structures, and platform The effect of small load and guaranteed motion accuracy

Active Publication Date: 2013-09-25
GUANGDONG UNIV OF TECH
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Problems solved by technology

In addition, the actuator system generated by micro-nano motion involves coupling modeling of multiple physical fields such as electricity, magnetism, mechanism, and functional materials. The mechanism of micro-nano precision generation based on functional materials under micro-c

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  • Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method
  • Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method
  • Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method

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[0021] Examples:

[0022] The structure diagram of the present invention is as figure 1 , 2 , 3 and 4, the high-speed and high-precision macro and micro platform based on piezoelectric ceramics of the present invention includes a platform bottom plate 1 and a voice coil motor. The platform bottom plate 1 is installed on the vibration isolation base 16, and the voice coil motor is installed on the platform. On one side of the bottom plate 1, the voice coil motor includes a voice coil motor housing 7, a voice coil motor magnet assembly 8, a voice coil motor coil 9, a voice coil motor linear encoder 10, a voice coil motor shaft 11, a motor shaft connecting frame 12, The voice coil motor extends shaft 13 and the coupling 26, wherein the voice coil motor magnet assembly 8 is installed on the side of the voice coil motor housing 7, the voice coil motor coil 9 is installed on the bottom of the voice coil motor housing 7, and the voice coil motor shaft 11 Installed in the voice coil moto...

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Abstract

The invention relates to a piezoelectric-ceramics-based high-speed high-precision macro-micro platform and a switching method. The macro-micro platform comprises a platform base plate and a voice coil motor, wherein the platform base plate is disposed on a vibration isolation pedestal, the voice coil motor is disposed at one side of the platform base plate, and the voice coil motor comprises a voice coil motor shell, a voice coil motor magnet assembly, a voice coil motor coil, a voice coil motor linearity encoder and a motor shaft connecting rack. Because the voice coil motor is used to drive the platform to feed in a large stroke and a high speed, and a piezoelectric ceramics is directly connected with an output shaft of the voice coil motor, the macro-micro platform is compact in structure and easy to feedback control. Additionally, the platform is provided with the piezoelectric ceramics which plays a vibration damping effect on the high-speed motion platform by applying an opposite acting force, so that the problem that the high-acceleration motion platform is large in vibration and hard to be stable rapidly; and after the platform is stable, the piezoelectric ceramics switches functions for driving the micro platform to move, and by closed ring control of an absolute grating, the precision positioning of platform micro motion is realized.

Description

technical field [0001] The invention relates to a high-speed, high-precision macro-micro platform based on piezoelectric ceramics and a switching method, and belongs to the transformation technology of the high-speed, high-precision macro-micro platform based on piezoelectric ceramics. Background technique [0002] The high-quality and high-capacity manufacturing of microelectronic products depends on the balance between high-precision positioning and high-acceleration motion of key mechanisms. High-precision and high-acceleration motion and positioning can be realized by compound motion combining macro and micro motion. Similar research has been done at home and abroad. However, the core issues such as the switching mechanism and behavior description of macro-micro composite high-speed motion and its subsystem motion, including mathematical description, vibration behavior, motion characteristics, and stability evaluation, have not been effectively resolved. The structural ...

Claims

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Application Information

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IPC IPC(8): B81C99/00
Inventor 高健谭国成陈新姜永军曹占伦杨志军刘冠峰李泽湘
Owner GUANGDONG UNIV OF TECH
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