Palladium nano particle dot matrix hydrogen sensor with controllable sensing parameters

Abstract

The invention discloses a palladium nano particle dot matrix hydrogen sensor with controllable sensing parameters. The sensor comprises a pair of insulating flexible substrates (101) with metal electrodes (102), a Pd nano particle dot matrix (103) arranged between the electrodes, a deformation control device (105) for deformation of the flexible substrates, and a corresponding signal monitoring device (104) also arranged between the electrodes. According to the sensor, the work distance of a palladium nano particle dot matrix can be controlled to vary in multiple regions by regulation on strain, and thus, the sensing parameters, such as the sensitive pressure and the time, of the hydrogen sensor can be regulated effectively. The hydrogen sensor can regulate the hydrogen gas-sensitive property index of the Pd nano particle dot matrix in real time without changing the Pd nano particle deposit rate and the electrode structure. Further, the application range of the sensor is expanded and the use cost is lowered. The hydrogen sensor provided by the invention can be used in a plurality of fields related to hydrogen usage safety and needing quantitative detection on hydrogen in industrial and scientific research.

Description

1. Technical field [0001] The invention relates to a hydrogen sensor, in particular to a palladium nano particle lattice hydrogen sensor with adjustable sensing parameters. 2. Background technology [0002] Hydrogen (H 2 ) are widely used in industry, medicine, military and scientific research fields. Hydrogen is flammable and explosive, and its explosion limit is 4% at 25°C. Therefore, it is very important to detect hydrogen at concentrations below 4%. F.A. Lewisd et al. used metal palladium (Pd) to detect hydrogen (F.A. Lewis, "The Palladium Hydrogen System" Academic Press, New York, 1967), which is a pioneering work in the field of hydrogen sensing. The sensing principle is based on the dissolution of hydrogen in metal palladium to form a hydride PdH with a lower conductivity than pure metal palladium. x , thus increasing the resistance of metal palladium, this working principle belongs to the resistive sensing mechanism. Based on this working principle, various modi...

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Problems solved by technology

[0004] 1. The preparation method is complicated, and the conductance of the formed nanowire array cannot be monitored in real time, and it is difficult to ensure its stability and consistency when used for hydrogen sensing, and it is not suitable for industrial scale production;

[0005] 2. It is also difficult to integrate the palladium nanowire sensing unit with the electrical measurement unit and data processing unit to form a micro-nano sensor device by using this preparation method, thus limiting its application in the field of micro-electromechanical devices (MEMS);

[0006] 3. The range of measuring the hydrogen concentration is limited to within 2%, and the hydrogen concentration exceeding 2% will cause the Pd nanowires to break

However, the quantitative control of nanoparticle coverage is also affected by many factors such as electrode parameters, temperature, Pd nanoparticle size, and fusion growth between nanoparticles. Complexity and lack of consistent control over device performance

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