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Pinhole collimator

A technology of collimator and pinhole, which is applied in the field of collimator, can solve the problems of large heavy ion beam spot, unsatisfactory pinhole shape, and low-energy scattering of heavy ion micro-beam, so as to reduce low-energy scattering components and achieve good straightness , reducing the effect of low-energy scattering

Active Publication Date: 2013-10-02
CHINA INSTITUTE OF ATOMIC ENERGY
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AI Technical Summary

Problems solved by technology

[0005] In order to solve the unsatisfactory pinhole shape of the existing pinhole collimator, the low-energy scattering of the heavy ion micro-beam is serious, resulting in excessive heavy ion beam spot large, can not meet the application requirements and other problems, the present invention provides a pinhole collimator

Method used

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Embodiment

[0023] A pinhole collimator, comprising an upper substrate, a first slit structure, a second slit structure and a lower substrate; the first slit structure and the second slit structure are made of It is composed of two blades with opposite cutting edges, and there is a slit between the opposite cutting edges, and the thickness of the cutting edge is required to ensure that the collimated object will not be transmitted; the two blades of the first slit structure are formed by the upper substrate fixed together, the two blades of the second slit structure are fixed together by the lower substrate; the upper substrate leaves an opening that makes the partial slit of the first slit structure not blocked, and the lower substrate leaves an opening that makes Part of the slit opening of the second slit structure is not blocked; the integral structure formed by the upper substrate and the first slit structure is stacked and fixed with the integral structure formed by the lower substra...

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Abstract

The invention relates to a collimator, and solves the problems that the conventional pinhole collimator is undesirable in pinhole shape, so that low-energy scattering of heavy ion microbeams is serious, spots of the heavy ion beams are overlarge, and application requirements cannot be met. The pinhole collimator provided by the invention comprises an upper end liner, a first slit structure, a second slit structure and a lower end liner; the first slit structure as well as the second slit structure comprises two blades which are arranged in the same plane and the cutting edges of the blades are opposite to each other; a slit is reserved between the opposite cutting edges; the cutting edges are required to be thick enough to prevent transmission of an object to be collimated. The pinhole collimator provided by the invention has the advantages that the straightness of the top ends of the cutting edges of the blades is good, and the width of a spliced slit can be smaller than 1 Mum, so that the low-energy scattering ingredients of the heavy ion microbeams can be reduced better, the spots of the heavy ion beams are good in quality, and the application of the pinhole collimator in heavy ion microbeam irradiation devices is realized better.

Description

technical field [0001] The invention relates to a collimator, in particular to a pinhole collimator. Background technique [0002] The heavy ion micro-beam irradiation device is an irradiation device that limits the heavy ion beam spot with a diameter of millimeter order produced by a conventional accelerator to the micron level by means of collimation or focusing. As a unique irradiation method, heavy ion microbeam irradiation has broad application prospects in the research of the single event effect mechanism of microelectronic devices, radiation biology, and materials science. Since the early 1980s, countries around the world have begun to use heavy ion microbeam irradiation to study single event effects, and have developed rapidly since the 1990s. So far, almost without exception, all countries with heavy ion accelerators have established heavy ion micro-beam irradiation devices and carried out research work on single event effects and other aspects. For example, the ...

Claims

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Application Information

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IPC IPC(8): G21K1/02G01N23/00
Inventor 惠宁许谨诚郭刚沈东军
Owner CHINA INSTITUTE OF ATOMIC ENERGY
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