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Method for detection of ingredient content of hydrogen-neon-argon ternary mixed gas

A technology of mixed gas and component content, applied in the field of gas chromatography analysis, can solve problems such as difficult separation and loss of linear ratio

Active Publication Date: 2013-10-09
WUHAN IRON & STEEL GRP GAS CO LTD +1
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Problems solved by technology

[0003] The commonly used gas detection and analysis method in the prior art is gas chromatography analysis method, which can analyze the concentration of various gases such as hydrogen and carbon dioxide in the mixed gas. For example, Cao Yongjie et al. reported a kind of mixed gas analysis method (Cao Yongjie, Dong Yulian. B Analysis of trace impurities in borane mixed gas. Low Temperature and Special Gas. Issue 01, 2011), but this method cannot be used for mixed gas mixed with hydrogen, neon and argon in a certain proportion, and the argon content The content of hydrogen and neon is much larger than that of hydrogen and neon, otherwise the measurement result will lose the linear ratio; in addition, the chemical properties of hydrogen and neon are similar in the chromatographic detection process, and it is not easy to separate

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  • Method for detection of ingredient content of hydrogen-neon-argon ternary mixed gas
  • Method for detection of ingredient content of hydrogen-neon-argon ternary mixed gas
  • Method for detection of ingredient content of hydrogen-neon-argon ternary mixed gas

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Embodiment Construction

[0023] The present invention will be further described below in conjunction with accompanying drawing and specific embodiment:

[0024] A certain unit has newly developed a protective gas for electronic chips, which is mainly composed of hydrogen, neon and argon ternary mixed gas according to the following volume percentage, that is, H 2 :Ne:He=2.5%:7.5%:90%. Each component needs to be prepared according to the specified ratio. When the content of a certain component deviates from the design value by more than 15%, the production line will be interrupted. Now it is necessary to detect the content of the protective gas composed of the ternary mixed gas to be used in the production line. The method is as follows:

[0025] 1) Prepare a bottle of 8L standard gas with hydrogen volume percentage content of 2.5%, neon gas volume percentage content of 7.5%, and helium as the rest;

[0026] 2) Using helium as the carrier gas, use a thermal conductivity analyzer to measure the combin...

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Abstract

The invention discloses a method for detection of ingredient content of hydrogen-neon-argon ternary mixed gas. The method comprised the following steps of 1, preparing hydrogen-neon-argon ternary standard gas, 2, by helium as carrier gas, respectively determining total peak area values of hydrogen and neon in the standard gas and in hydrogen-neon-argon ternary mixed gas, calculating a correction factor KHN of total content of hydrogen and neon, and calculating total volume percentage content VHN of hydrogen and neon through the correction factor KHN, 3, by neon as carrier gas, determining peak area values of hydrogen in the standard gas and in the hydrogen-neon-argon ternary mixed gas, calculating a correction factor KH of content of hydrogen, and calculating volume percentage content VH of hydrogen through the correction factor KH, and 4, through formulas of VN=VHN-VH and VY=100%-VHN, calculating volume percentage content VN of neon in the hydrogen-neon-argon ternary mixed gas and volume percentage content VY of argon in the hydrogen-neon-argon ternary mixed gas. The method can determine content of all ingredients of hydrogen-neon-argon ternary mixed gas under the condition of large content of argon and can guarantee normal production.

Description

technical field [0001] The invention belongs to the technical field of gas chromatographic analysis methods, and in particular relates to a method for detecting the component content of a hydrogen-neon-argon ternary mixed gas. Background technique [0002] The gas containing two or more effective components, or the gas whose content exceeds the specified limit although it is an ineffective component, is a mixed gas. Mixed gas is widely used in electric light source, laser mixed gas, welding protection and so on. In general, the components of the mixed gas need to be prepared according to the specified ratio. When the content of some components deviates from the design value by more than a certain limit, it may cause the interruption of the production line. Therefore, it is necessary to detect the content of each component in the mixed gas shielding gas to be used on the production line before use. [0003] The commonly used gas detection and analysis method in the prior ar...

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Application Information

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IPC IPC(8): G01N30/02
Inventor 谢程路家兵潘浩韩曦翁晓蓉彭莹莹
Owner WUHAN IRON & STEEL GRP GAS CO LTD
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