Polarization independent 1550 nanometer high-diffraction-efficiency double-layer transmission grating
A technology of diffraction efficiency and transmission grating, applied in the direction of diffraction grating, etc., to achieve the effect of simple structure and good manufacturing process tolerance
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Embodiment 1
[0024] The polarization-independent high-diffraction-efficiency double-layer transmission grating is composed of a quartz substrate and a rectangular grating 3 integrally. The period of the rectangular grating 3 is 1064 nanometers and the duty ratio is 0.64. The rectangular grating 3 has two layers: the outer grating 1 is a low refractive index material SiO 2 (refractive index 1.45), thickness is 377 nanometers; inner layer grating 2 is high refractive index material Si 3 N 4 (Refractive index 1.99), thickness is 1426 nanometers. Such as figure 2 When the incident angle is 46.76°, in the range of 1500-1610 nm, the -1 order transmittance of the grating TE and TM polarization is high, higher than 96%, covering the C+L band commonly used in optical fiber communication (1512-1601 nm ). In particular, at a wavelength of 1550 nm, the transmittance is higher than 98%. Such as image 3 As shown, when the incident wavelength is 1550 nanometers, the TE, TM light-level 1 transmitt...
Embodiment 2
[0026] The polarization-independent high-diffraction-efficiency double-layer transmission grating is composed of a quartz substrate and a rectangular grating 3 integrally. The period of the rectangular grating 3 is 1100 nanometers and the duty ratio is 0.61. The rectangular grating 3 has two layers: the outer grating 1 is a low refractive index material SiO 2 (refractive index 1.46), thickness is 369 nanometers; inner layer grating 2 is high refractive index material HfO 2 (refractive index 1.96), thickness is 1458 nanometers. Such as Figure 4 At an incident angle of 46.76°, the -1st order transmission of the grating is higher than 95% in the range of 1500-1610 nm for both TE and TM polarizations.
Embodiment 3
[0028] The polarization-independent high-diffraction-efficiency double-layer transmission grating is composed of a quartz substrate and a rectangular grating 3 integrally. The period of the rectangular grating 3 is 1040 nanometers and the duty ratio is 0.637. The rectangular grating 3 has two layers: the outer grating 1 is a low refractive index material SiO 2 (refractive index 1.46), thickness is 377.7 nanometers; inner layer grating 2 is high refractive index material Ta 2 o 5 (refractive index 2.04) and a thickness of 1410 nanometers. Such as Figure 5 At an incident angle of 46.76°, the -1st order transmission of the grating is higher than 95% in the range of 1500-1610 nm for both TE and TM polarizations.
[0029] The double-layer transmission grating with polarization-independent high-diffraction efficiency in the 1550 nm band of the present invention has high transmittance for both TE and TM polarized light, and has the advantages of flexible use and wide bandwidth. I...
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