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Device and method for cleaning organic electro luminescence (EL) mask

A technology for cleaning devices and masks, applied in the directions of cleaning methods, cleaning methods and utensils, chemical instruments and methods using gas flow, etc., can solve the problems of complicated mechanism, distortion of organic EL masks, environmental pollution, etc. Re-adhesion prevention, simplification of the mechanism, and high cleanability effects

Inactive Publication Date: 2013-11-20
HITACHI HIGH-TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the organic EL mask to be cleaned is an extremely thin metal plate of micrometers (about tens of micrometers), and during wet cleaning, the organic EL mask will be twisted and deformed due to hydraulic pressure.
In addition, when wet cleaning is performed with a chemical solution such as a surfactant, a chemical solution supply mechanism and a drainage treatment mechanism for treating the used chemical solution (drainage) are required, so the mechanism is complicated, and the drainage also causes environmental pollution

Method used

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  • Device and method for cleaning organic electro luminescence (EL) mask
  • Device and method for cleaning organic electro luminescence (EL) mask
  • Device and method for cleaning organic electro luminescence (EL) mask

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Embodiment Construction

[0052] Hereinafter, embodiments of the present invention will be described with reference to the drawings. figure 1 with figure 2 It is a schematic structural diagram of the mask cleaning apparatus 1 for organic EL of this invention. The mask cleaning device 1 for organic EL of the present invention is equipped with a mask 2 for organic EL, a base 11, a mounting table 12, a clamping part 13, a moving part 14, a laser light source 15, a galvano mirror (galvanomira) 16, Wind part 17 and suction part 18. The mask 2 for organic EL is an extremely thin metal plate for vapor-depositing an organic material as a light-emitting layer in a limited area on a glass substrate (not shown) constituting an organic EL display to form a pattern. In recent years, the size of the mask 2 for organic EL has also become extremely large with the enlargement of the screen of an organic EL display. The mask 2 for organic EL used below is an extremely thin and large size.

[0053] Such as image 3...

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Abstract

The object of the present invention is to remove the evaporation material attached to an organic EL mask without contacting to a substrate. The mask cleaning device of the invention is used to removethe evaporation material (20) attached to the organic EL mask (2) with several openings (4). On the surface of the organic EL mask (2), the laser from a laser light source (15) scan in a Y direction by means of a current mirror (16), the mask board (2) is moved in X direction by a mobile part (14), thus, the entire surface of the mask(2) is scanned. An air flow (30) is formed by an air supply part(17) and an air absorb part (18) above the surface of the organic EL mask (2), the evaporation material (20) is cracked to form dissociation resultant (21) flying upwards by means of laser scanning,and is carried and removed by the air flow (30) so as to clean the mask.

Description

[0001] This divisional application is based on the Chinese patent application with the application number 200910174768.X, the application date is September 17, 2009, and the invention title is "Mask cleaning device and method for organic EL, organic EL display and its manufacturing device" Divisional application. technical field [0002] The present invention relates to a mask cleaning device for organic EL that cleans a mask for organic EL by laser irradiation, a manufacturing device for an organic EL display, an organic EL display, and a mask cleaning method for organic EL. Background technique [0003] Organic EL (Electro Luminescence) displays are widely used as low power consumption, lightweight and thin image display devices that do not require a backlight. Its structure is that an organic EL thin film layer is stacked on a transparent glass substrate, and the organic EL thin film layer is a structure in which an anode layer and a cathode layer sandwich a light emittin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B7/00B08B15/00B23K26/36
CPCH01L21/67028C23C14/042C23C14/12B08B5/04B08B7/0042H10K71/166H10K71/00
Inventor 井崎良片冈文雄片桐贤司韭泽信广
Owner HITACHI HIGH-TECH CORP