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VxWorks-based lithography machine double-workbench communication method and device

A technology of double worktable and communication method, which is applied in the direction of photolithography exposure device, microlithography exposure equipment, electrical components, etc., can solve the problems of poor real-time communication, reduce correlation, prevent information loss, and ensure correctness The effect of receiving

Active Publication Date: 2013-12-11
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem of poor real-time communication of the VxWorks operating system traditionally using TCP or IP protocols. The present invention provides a VxWorks-based communication method and device for a dual-workpiece platform of a lithography machine

Method used

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  • VxWorks-based lithography machine double-workbench communication method and device
  • VxWorks-based lithography machine double-workbench communication method and device

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specific Embodiment approach 1

[0043] Specific implementation mode one: combine figure 1 Illustrate this embodiment, the VxWorks-based lithography machine double work table communication method described in this embodiment, it is realized based on double work table lithography machine, upper computer and VME industrial computer,

[0044] The VME industrial computer is inserted with a motion control card, and the motion control card is embedded with an instruction calculation model, a control model, a motor model and a workpiece table mathematical model; the motion control card is used to collect the Running data, and sending control data to the double-workbench lithography machine at the same time;

[0045] The instruction solving model is used to solve the input instructions and send the resolved instructions to the control model;

[0046] The control model is used to adjust the received instructions, generate the motor control amount and the workpiece table control amount, and send the motor control amou...

specific Embodiment approach 2

[0070] Specific implementation mode two: combination image 3 Describe this embodiment. This embodiment is a further limitation of the VxWorks-based lithography machine dual-workpiece platform communication method described in the first specific embodiment.

[0071] The upper computer uses the TCP communication protocol to download the command to the VME industrial computer through the socket API interface through the following steps:

[0072] Call the function socket () to establish a stream socket, and then call the step of the function bind ();

[0073] The function bind() associates the established stream socket with the local network address, and then calls the function Connect();

[0074] The function Connect() sends a connection request to the VME industrial computer, and then calls the function zbufCreate();

[0075] The steps of the function zbufCreate() to create a ZBUF socket;

[0076] Use the created ZBUF socket for data manipulation, and then call the function ...

specific Embodiment approach 3

[0081] Specific implementation mode three: combination image 3 Describe this embodiment, this embodiment is a further limitation of the VxWorks-based lithography machine dual-workpiece platform communication method described in the second specific embodiment,

[0082] The VME industrial computer uses the TCP communication protocol to receive the commands sent by the host computer from the socket ZBUF API interface through the following steps:

[0083] Call the function socket () to establish a stream socket, and then call the step of the function bind ();

[0084] The function bind () associates the stream socket established with the local network address, and then calls the step of the function listen ();

[0085] The function listen() puts the established stream socket into the listening state, notifies the TCP communication protocol, and prepares to receive the steps of the request connection;

[0086] When the request connection signal and the new connection signal sent...

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Abstract

The invention relates to a communication method and device, and in particular relates to a VxWorks-based lithography machine double-workbench communication method and device, aiming at solving the problem that a conventional VxWorks operating system using a TCP (Transmission Control Protocol) or an IP (Internet Protocol) is poor in communication real-time performance. The communication method and the device are realized based on a double-workbench lithography machine, an upper computer and a VME (Virtual Machine Environment) industrial personal computer, and adopts double channels of the TCP and a UDP (User Datagram Protocol) for communication, wherein the channel of the TCP is used for transmitting instructions of the upper machine, the channel of the UDP is used for transmitting execution result information of the VME industrial personal computer, a buffering queue is used for caching all the instructions and data information which are then read out one by one, and finally executed and sent, and a zero copy buffering area is adopted for nesting word interfaces. The communication method and device are used for communication when a lithography machine double-workbench is arranged in an environment which is provided with the VxWorks operating system and has access to the Ethernet.

Description

technical field [0001] The invention relates to a communication method and device, in particular to a VxWorks-based communication method and device for a dual-workpiece platform of a lithography machine. Background technique [0002] VxWorks is a real-time operating system developed by Wind River Corporation of the United States. It is widely used in many fields with high real-time requirements due to its good reliability and excellent real-time performance. The most time-consuming operations in network processing are buffer copy and calculation / checksum calculation. The traditional VxWorks operating system communication using TCP or IP protocol has limited support for the link layer and needs to be forwarded by system tasks. Real-time Therefore, it is necessary to increase the communication speed of the network and reduce the time consumption in network processing. Contents of the invention [0003] The purpose of the present invention is to solve the problem of poor rea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20H04L29/06
Inventor 陈兴林刘川刘杨毕延帅
Owner HARBIN INST OF TECH
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