Parallel-connection flat field grating working in soft X-ray wave band and design method thereof

A design method and X-ray technology, applied in the field of flat-field gratings, can solve problems such as inability to work at the same time, and achieve the effect of high-resolution spectrum

Active Publication Date: 2013-12-18
UNIV OF SCI & TECH OF CHINA
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  • Abstract
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AI Technical Summary

Problems solved by technology

Both technology 2 and technology 3 broaden the working band, but the two gratings are switched by a switching device and cannot work at the same time

Method used

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  • Parallel-connection flat field grating working in soft X-ray wave band and design method thereof
  • Parallel-connection flat field grating working in soft X-ray wave band and design method thereof
  • Parallel-connection flat field grating working in soft X-ray wave band and design method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0026] The purpose of the present invention is to expand the working band of the soft X-ray flat-field grating, and the structure of the specific parallel grating is as follows figure 1 shown. G1 and G2 are two sets of gratings with different line densities. We made the two sets of gratings on the same substrate by exposing-etching-re-exposure-re-etching, and the base surface of the grating is a spherical surface.

[0027] Parallel flat-field gratings require two sets of gratings to have the same incident distance, incident angle, imaging position and spherical base radius, so that two sets of gratings can work at the same time and realize the extension of the wavelength band. We use the genetic algorithm to optimize the working parameters of the grating, such as the incident distance, incident angle, and imaging position, as well as the grating's base radius, center line density, and line density variation coefficient of the grating, to determine various parameters. Theoreti...

Embodiment 2

[0037] The result in Example 1 is just one of many parallel flat-field grating parameters. When the radius of curvature of the grating substrate changes, we can still optimize the parameters of the flat-field grating to meet the requirements of parallel flat-field gratings. For example, when the radius of curvature of the grating base is 9263mm, we obtain the parameters in Table 2 by optimizing the grating parameters:

[0038] Table 2 Parameters of parallel flat-field gratings

[0039]

Embodiment 3

[0041] When the required incident distance and imaging position change, we can still optimize the parameters of the flat-field grating to meet the requirements of the parallel flat-field grating. For example, when the incident distance is 335.6mm and the imaging position is 210.5mm, we obtain the parameters in Table 3 by optimizing the grating parameters:

[0042] Table 3 Parameters of parallel flat-field gratings

[0043]

[0044]

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Abstract

The invention provides a parallel-connection flat field grating working in a soft X-ray wave band and a design method of the parallel-connection flat field grating working in the soft X-ray wave band. Two different flat filed gratings G1 and G2 are made on a same base to form the integral parallel-connection flat field grating. The grating works under the condition of grazing incidence and is applicable to the soft X-ray wave band. On the basis of the aberration theory of concave gratings, work parameters such as incidence distances, incidence angles and imaging positions of the G1 and the G2 are optimized to be completely the same, and therefore the G1 and the G2 can work simultaneously. The work wave band of the parallel-connection flat field grating is the sum of the work wave band of the G1 and the work wave band of the G2, and thus the work wave band of the grating can be effectively expanded. The parallel-connection flat field grating solves the problem that a flat filed grating is narrow in work wave band and meanwhile provides an effective technology for simultaneously measuring a broad spectrum of soft X-rays.

Description

technical field [0001] The invention relates to the technical field of flat-field gratings, in particular to a parallel flat-field grating working in the soft X-ray band and a design method thereof. Background technique [0002] Prior art 1 (see literature Toshiaki Kita, Tatsuo Harada, N.Nakano, H.Kuroda."Mechanically ruled aberration-corrected concave gratings for a flat-field grazing-incidence spectrograph".Applied Optics, Vol.22,512-513,1983 ) using a spherical variable pitch grating to achieve a flat-field spectral surface of 5nm to 20nm. The radius of the spherical base of the grating is 5649mm, the line density at the center of the grating is 1200 lines / mm, the light source is 237mm away from the center of the grating, the incident angle is 87°, and the distance between the flat spectral plane and the center of the grating is 235mm. The characteristics of this grating are: only one grating can form a straight spectrum surface, and the structure is simple; but its work...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18G02B27/44G01J3/18G01J3/28
Inventor 刘正坤王庆博陈火耀邱克强付绍军
Owner UNIV OF SCI & TECH OF CHINA
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