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Silicon wafer processing device

A processing device and silicon wafer technology, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, test sample preparation, etc., can solve problems such as low production efficiency and environmental pollution, improve production efficiency, improve product quality, and avoid The effect of human injury

Active Publication Date: 2013-12-25
LONGI GREEN ENERGY TECH CO LTD
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AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a silicon wafer processing device to solve the existing problems of low production efficiency in manual polishing and environmental pollution in strong acid polishing

Method used

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  • Silicon wafer processing device
  • Silicon wafer processing device
  • Silicon wafer processing device

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Embodiment Construction

[0025] The present invention will be described in detail below in combination with specific embodiments and multiple drawings.

[0026] refer to figure 1 and figure 2 , the silicon wafer processing device 10 includes a machine platform 11 , a first processing part 12 and a second processing part 13 . The first processing part 12 and the second processing part 13 are sequentially arranged on the machine platform 11 .

[0027] The machine table 11 includes a base 110 , a pole 111 , an upper plate 112 and two moving plates 113 . The upper plate 112 is disposed above the base 110 through the pole 111 , and each moving plate 113 is located between the base 110 and the upper plate 112 and can move toward or away from the upper plate 112 .

[0028] The first processing unit 12 includes a silicon wafer mounting mechanism 14 , a first processing mechanism 15 and a first processing liquid supply mechanism 16 .

[0029] The wafer mounting mechanism 14 is disposed on the top of the m...

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Abstract

A silicon wafer processing device comprises a table, and one or more processing parts sequentially arranged on the table, wherein the processing parts comprise silicon wafer mounting mechanisms and processing mechanisms; the silicon wafer mounting mechanisms are arranged at the upper part of the table and used for mounting silicon wafers and driving the silicon wafers mounted on the silicon wafer mounting mechanisms to rotate in a first direction; the processing mechanisms are arranged at the lower part of the table and provided with processing discs opposite to the silicon wafer mounting mechanisms; the processing discs can move close to or far away from the silicon wafer mounting mechanisms; and when the processing discs are close to the silicon wafer mounting mechanisms, the processing discs rotate in a second direction opposite to the first direction to process the silicon wafers. The device realizes automatic processing operation of the monocrystalline silicon wafers, avoids injuries to a human body and pollution to an environment in the prior art, and improves the product quality and the production efficiency.

Description

technical field [0001] The invention belongs to the technical field of silicon wafer surface processing equipment, and relates to a silicon wafer processing device. Background technique [0002] With the continuous development of the world economy, the demand for high-efficiency energy in modernization is increasing. Photovoltaic power generation, as one of the main energy sources for green energy and sustainable development of human beings, has been increasingly valued and developed vigorously by countries all over the world. As the basic material for photovoltaic power generation, monocrystalline silicon wafers need to undergo various tests to ensure their quality. Before certain tests, such as the oxygen / carbon content test, the silicon wafer needs to be ground and / or polished to make a test sample. At present, most of the processing methods for silicon wafers are manual grinding or polishing with strong acid. Manual polishing not only has low production efficiency, bu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/32H01L21/67H01L21/02
Inventor 邢建龙张治国王真
Owner LONGI GREEN ENERGY TECH CO LTD
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