Enhanced multi-photon imaging resolution method

A multi-photon and photo-curing technology, applied in optics, additive processing, optomechanical equipment, etc., can solve problems such as limiting the imaging resolution of 3D structures

Inactive Publication Date: 2014-01-01
3M INNOVATIVE PROPERTIES CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The shape of voxels at the laser beam focus can limit the imaging resolution of 3D structures

Method used

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  • Enhanced multi-photon imaging resolution method

Examples

Experimental program
Comparison scheme
Effect test

example 2 and comparative example 1-2

[0140] Example 2 and Comparative Examples 1-2. Voxel size measurement

[0141] Four membranes were prepared according to Example 2 and Comparative Examples 1-w, and a cube with dimensions 50 μm x 50 μm x 10 μm was written using Waverunner laser / scanner control software (manufactured by Nutfield Technology, Hudson, NH), With writing the flakes at a pitch of 0.5 μm, each flake is filled with hatched lines also written 0.5 μm apart. Use appropriate laser power levels and varying speeds. The surface roughness of the developed samples was measured by non-destructive optical interferometry and is shown in Table 2.

[0142] Table 2

[0143] Surface roughness of membrane samples versus scan speed

[0144]

[0145] Example 2 has higher surface roughness at lower speeds, indicating voxel size shrinkage as writing speed decreases (dose increases). In contrast, Comparative Examples 1 and 2 did not show such higher roughness at lower writing speeds.

[0146] table 3

example 4-6

[0150] Films were prepared as in Example 1, substituting the sensitizers listed in Table 3 below for the 2P-photoinitiator (structure (IV)). The voxel height (proportional to dose) as a function of the inverse of scan speed was determined as in Example 1 and plotted in the figure below. Figure 5 Data showing the dyes in Examples 4-6 are shown in . There is a maximum in the plot of voxel size versus the reciprocal scan speed (dose), in at least a portion of the curve the voxel size decreases with decreasing scan speed (increasing dose). Lines in the graph are shown to illustrate trends.

[0151] The following is an exemplary embodiment of a method of increasing multiphoton imaging resolution according to aspects of the invention.

Embodiment 1

[0152] Embodiment 1 is a method of forming a three-dimensional microstructure comprising: providing a photocurable composition comprising: a prepolymer comprising an acrylate monomer and a multiphoton photon photopolymer comprising at least one distyrylbenzene dye an initiator system; and imagewise exposing at least one voxel of the photocurable composition to a dose of electromagnetic energy under conditions effective to photodefinably form at least one solid voxel having a volumetric three-dimensional microstructure, Wherein the volume of the solid voxel varies inversely with the dose.

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Abstract

A method and a multi-photon photocurable composition are provided that allow for the formation of a three-dimensional microstructure having enhanced imaging resolution. The method involves providing a multi-photon photocurable composition system having an acrylic prepolymer and a multiphotohn photoinitiator system that comprises at least one distyrylbenzene dye or a benzothiazolyl fluorine derivative. The method includes imagewise exposing at least one voxel of the photocurable composition to a dose of electromagnetic energy under conditions effective to photodefinably form at least one solid voxel of a three-dimensional microstructure having a volume, wherein the solid voxel volume varies inversely with the dose.

Description

technical field [0001] The present disclosure relates broadly to methods of generating structures using multiphoton absorption polymerization, and more specifically, to methods of increasing imaging resolution. Background technique [0002] Multiphoton curing methods can be used to fabricate two-dimensional (2D) and / or three-dimensional (3D) structures with micrometer or nanoscale resolution. Microfabrication of organic optical elements is described, for example, in US Patent No. 6,855,478 (DeVoe et al.). In these methods, a layer of material comprising a multiphoton-curable photoreactive composition is coated on a substrate (e.g., a silicon wafer), which is then selectively etched using a focused source of radiant energy (e.g., an ultrafast laser beam). solidified. [0003] In one such fabrication method, when a pulsed laser beam of visible or near-infrared (NIR) radiation is focused into an engineered photopolymer resin, voxel three-dimensional (3D) volume elements are g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/038G03F7/20G03F7/00G03F7/029G03F7/031
CPCG03F7/029G03F7/0037G03F7/2055G03F7/031G03F7/038B33Y70/00
Inventor R·J·德沃埃
Owner 3M INNOVATIVE PROPERTIES CO
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