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A workpiece table device

A technology of workpiece table and station, which is applied in the field of lithography machine, can solve the unsolved problems of high precision of micro-motion table, small stroke precision positioning, etc., and achieve the effect of improving the motion accuracy of the whole machine, reducing interference and improving efficiency

Active Publication Date: 2016-12-21
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Description
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AI Technical Summary

Problems solved by technology

[0004] In order to solve the above problems, in addition to transforming the existing "moving coil" type planar motor into a "moving magnet" type planar motor, some attempts have been made to the wireless control system of the coarse motion table, but the problem of the fine motion table has not yet been solved. High precision, small stroke precision positioning problem

Method used

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  • A workpiece table device
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Embodiment Construction

[0027] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.

[0028] In general, the present invention aims to propose a workpiece table device, which is characterized in that it includes at least one workpiece table, the workpiece table includes a micro-motion table and an energy storage unit, and the energy storage unit provides electric energy for the micro-motion table. The energy storage unit is located on the micro-movement table; the workpiece table device also includes charging manipulators, water changing manipulators and wireless control systems corresponding to the number of work tables, and each charging manipulator charges the corresponding energy storage unit; Each of the water-changing manipulators replaces the cooling medium for the cooling circulation system in the corresponding workpiece table; each of the wireless control systems controls th...

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Abstract

The invention provides a wireless controlled workpiece bench apparatus of a photoetching machine, which realizes the motion control of a microchecker by using an exchange window time to charge and provide cooling water for the microchecker. The workpiece bench apparatus comprises the microchecker, a wireless signal transceiver unit, an energy storage unit and a control unit, wherein the microchecker goes through a measuring station, a waiting station and an exposure station in a working cycle, a time difference between the time when the microchecker is at the measuring station and the time when the microchecker is at the exposure station is utilized for charging and changing water for a workpiece bench so as to realize the circulating operation of the workpiece bench apparatus, and the wireless signal transceiver unit is utilized for performing wireless control on a control system so that the interference brought to the high-precision microchecker by cable disturbance can be overcome, and the whole machine motion precision is enhanced.

Description

technical field [0001] The invention relates to the field of photolithography machines, in particular to a workpiece table device, which includes a coarse motion table and a micro motion table, and uses a wireless control system to realize wireless motion control of the micro motion table. Background technique [0002] In semiconductor lithography equipment, the precision motion device of the workpiece table is an extremely critical subsystem. Its positioning accuracy directly affects the performance of the lithography equipment, and its operating speed directly affects the production efficiency of the lithography equipment. The precise positioning of the workpiece table generally adopts a combination of coarse and fine positioning. The large-stroke drive device drives the coarse motion table to achieve long-distance coarse positioning with high-speed acceleration, and the fine motion table finally completes the precise positioning. The combination of coarse motion stage and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67G03F7/20
CPCG03F7/70216H01L21/67063H01L21/68
Inventor 吴飞刘剑张志刚袁志扬张俊李小平
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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