Substrate transfer facility and transfer method
A technology of transportation equipment and transportation method, which is applied in the direction of transportation and packaging, conveyor objects, electrical components, etc., which can solve the problems of increasing the overall operating cost and increasing cycle time, so as to reduce the amount of handling, reduce the production cycle time, and increase production capacity Effect
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[0027] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0028] In order to overcome such as figure 1 In the prior art, the handling machine 100 needs to carry the cassette 200 multiple times during the substrate production process. The present invention improves the original way of setting the processing chambers in parallel, so that the number of times the cassette 200 is transported by the transporter 100 is minimized during the transport process.
[0029] Such as figure 2 Shown is a schematic structural view of the first embodiment of the substrate transportation equipment of the present invention. In this embodiment, the original processing chambers arranged in parallel are changed to a mixed series form, that is, the first processing chamber 300 and the second processing chamber 400 are opposite to each other. The moving direction of the conveyor 100 is vertically arranged, the first proce...
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