Method and structure for packaging probes of differential pressure sensor

Abstract

The invention discloses a method and structure for packaging probes of a differential pressure sensor. The structure is characterized in that a gasket (86) is arranged on the periphery of a detection fluid inlet of a detection cavity (111), a filter screen (84) is arranged on the detection fluid inlet, a check ring (85) is arranged between an elastic membrane (113) and the detection cavity (111) to be used for shielding the elastic membrane (113), and an end cover (81) in a fixing hole is utilized to extrude and fix the elastic membrane (113) in the direction from the outside to the check ring (85); a thread sleeve (82) is arranged in the end cover (81) to fix optical fibers inside. The mode can guarantee machining precision and assembling precision, structures of the machined probes can be the same, therefore, realization of standardization, serialization and universalization is facilitated, and detection errors brought by the structural errors can be well avoided. The packaging structure can well fix fiber optics bundles.

Description

technical field [0001] The invention relates to a packaging method and structure of a differential pressure sensor probe, belonging to the field of sensor probe packaging. Background technique [0002] Differential Pressure Sensor DPS (Differential Pressure Sensor) is a sensor used to measure the difference between two pressures, usually used to measure the pressure difference between the front and back ends of a device or component. In recent years, differential pressure sensors have been widely used in many high-precision measurement occasions such as micro-flow measurement, leak testing, clean room monitoring, environmental tightness testing, gas flow measurement, and liquid level measurement. [0003] At present, the research on differential pressure sensors at home and abroad mainly focuses on the traditional piezoresistive differential pressure sensors and capacitive differential pressure sensors. The piezoresistive differential pressure sensor has a simple structure ...

AI Technical Summary

Problems solved by technology

[0008] In order to solve the problems of complex sensor structure, unreliable performance, high processing cost and large volume quality, it is proposed to adopt such a differential pressure sensing method and its sensor. The main point of this sensing method is that it is used to measure The detection fluid (such as hydraulic oil) that generates pressure from the measured object is used for sensing, so that the pressure generated by the detection fluid impacts one side of an elastic diaphragm to deform the elastic diaphragm; the other side of the elastic diaphragm is used The narrow-band laser in the incident fiber is irradiated, and the receiving fiber is used to receive the reflected light; in this way, when the elastic diaphragm is deformed, due to the change of the reflection angle, the reflected light changes accordingly, resulting in the output light intensity of the receiving fiber. In this way, the change in pressure caused by the detection fluid to the elastic diaphragm can be judged by detecting the change in the output light intensity of the receiving optical fiber

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