Unlock instant, AI-driven research and patent intelligence for your innovation.

MZ interference type optical biochemistry sensor chip embedded with FP cavity

A sensor chip, biochemical technology, applied in the measurement of phase influence characteristics, etc., to achieve the effects of low price, reduced size, and easy mass production

Inactive Publication Date: 2014-02-05
UNIV OF ELECTRONICS SCI & TECH OF CHINA
View PDF4 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the detection problem of some biochemical substances, and proposes an MZ interferometric optical biochemical sensor chip embedded with an FP cavity

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • MZ interference type optical biochemistry sensor chip embedded with FP cavity
  • MZ interference type optical biochemistry sensor chip embedded with FP cavity
  • MZ interference type optical biochemistry sensor chip embedded with FP cavity

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0016] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0017] Such as figure 1 and figure 2 As shown, the MZ interferometric optical biochemical sensor chip embedded with an FP cavity in this embodiment includes an SOI substrate composed of a silicon base layer 61, a silicon dioxide layer 62 and a single crystal silicon layer 63 that are sequentially stacked and bonded from bottom to top. , the single crystal silicon layer 63 of the SOI substrate comprises a MZ interference unit, the MZ interference unit comprises two sections of optical waveguides, one section of the optical waveguides contains a grating FP cavity 5, and the MZ interference unit and the grating FP cavity have a Not the same free spectral range, the two are optically coupled. The two sections of optical waveguides constituting the MZ interference unit have the same structure. To illustrate the difference, the two sections of o...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A purpose of the present invention is to solve the problem of detection of a plurality of biochemical substances. The MZ interference type optical biochemistry sensor chip embedded with a FP cavity mainly comprises a MZ interference unit, wherein the MZ interference unit comprises two sections of optical waveguides, one of the optical waveguides contains a grating FP cavity, and the MZ interference unit and the grating FP cavity have different free spectral ranges and form an optical coupling connection. According to the MZ interference type optical biochemistry sensor chip embedded with the FP cavity, the two free spectrums with different ranges are formed on the monocrystal silicon layer on the top, and the connection manner that the grating FP optical resonance cavity (grating FP cavity) is embedded into one of the arms (one of the optical waveguides) of the MZ interference structure (MZ interference unit) is adopted to form the interference type optical resonance cavity so as to detect influence of external substances on optical signals. Compared with other biochemical sensor chips, the MZ interference type optical biochemistry sensor chip of the present invention has characteristics of standardized production process, easy integration, excellent sensing performance, and the like.

Description

technical field [0001] The invention relates to the detection technology of specific chemical or biological substances such as gas molecules or biomolecules, specifically relates to the field of optical sensing technology, and particularly relates to an MZ interferometric optical biochemical sensor chip embedded with an FP resonant cavity. Background technique [0002] A biochemical sensor is a combination of a bioactive material and a corresponding transducer, which is used to measure a specific chemical or biological substance. Since the determination of these chemical or biological substances is of great significance in environmental monitoring, disease monitoring and drug development, the research on biochemical sensors has become very important. At present, typical optical biochemical sensors can be mainly divided into two categories: fluorescent-labeled optical biochemical sensors and unlabeled optical biochemical sensors. According to relevant literature, although flu...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/45
Inventor 王卓然袁国慧高亮
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA