Terahertz radiation detector

A terahertz radiation, terahertz technology, applied in the field of terahertz detection using microbolometers, can solve the problems of low radiation energy, inability to meet application requirements, low sensitivity, etc., and achieve improved sensitivity, low cost, and implementation. simple method effect

Inactive Publication Date: 2014-02-12
PEKING UNIV
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Problems solved by technology

The current microbolometer-type detectors mainly work in the long-wave infrared band. When performing terahertz detection, due to the low radiation energy of terahertz waves, the sensitivity of using microbolometer-type detectors for terahertz detection It is also very low and cannot meet the requirements of the application

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Embodiment Construction

[0025] In order to make the purpose, technical solution and advantages of the present invention clearer, the structure and implementation method of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0026] The terahertz radiation detector is composed of a terahertz sensitive structure and a substrate substrate (5) containing a readout circuit (8), and the terahertz sensitive structure may be one, or multiple, multiple sensitive structures A terahertz focal plane array (7) is formed to perform detection and imaging.

[0027] The terahertz sensitive structure is a hollow micro-bridge structure, and the micro-bridge structure is composed of a bridge deck (1), a bridge arm (2) and an anchor point (3), and the bridge arm (2) connects the bridge deck ( 1) To the anchor point (3), one is used to support the bridge deck (8) to form a suspended structure, thereby effectively suppressing heat loss after the sensitive structure absorb...

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Abstract

The invention provides a terahertz radiation detector. The terahertz radiation detector comprises a terahertz sensitive structure and a substrate chip including a reading circuit, wherein the terahertz sensitive structure comprises a terahertz absorption structure, a heat conversion layer and a protection layer, when passive/active terahertz waves are focused on the terahertz sensitive structure through a terahertz object lens, absorbed energy is converted into heat energy through the terahertz absorption structure, the heat energy is converted into an electric signal through the heat conversion layer, and the electric signal is read through the reading circuit on the substrate chip. According to the terahertz radiation detector, a terahertz micro-bolometer micro-bolometer operates under a non-refrigeration environment, single point detection can be carried out, terahertz imaging can further be realized through a focal plane array.

Description

technical field [0001] The invention belongs to the technical fields of THz-Terahertz detection and MEMS-microelectronic mechanical systems, and in particular relates to a technology for terahertz detection by using a microbolometer (Microbolometer). Background technique [0002] Terahertz waves generally refer to electromagnetic radiation with frequencies in the range of 0.1THz-10THz. In recent years, terahertz technology is gradually attracting widespread attention and has developed by leaps and bounds. Due to the high spatial and temporal resolution of terahertz waves, terahertz imaging and terahertz spectroscopy have become two key technologies for terahertz applications. On the one hand, because terahertz energy is very low, it will not have a destructive effect on matter. On the other hand, terahertz spectroscopy not only has a high signal-to-noise ratio, but can quickly analyze and identify the composition of samples, and terahertz technology can be used for non-con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J5/20G01J5/22B81B7/00
Inventor 文永正于晓梅马蔚张建林
Owner PEKING UNIV
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